MEMS Switching Circuit Reduces Routing Complexity

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Solution Overview

Problem

Conventional silicon-on-insulator (SOI) switches in mobile communication devices exhibit high on-resistance and off-capacitance, leading to degraded RF efficiency and performance due to higher figure-of-merit, which can be improved by replacing them with microelectromechanical systems (MEMS) switches.

Innovation Solution

A MEMS switching circuit with a MEMS-based driver circuit that uses a lesser number of control signals to identify and control a larger number of MEMS switches, reducing routing complexity and footprint by employing high and low driving voltages to close and open the switches, respectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional SOI switches are used in mobile communication devices, then the device can achieve basic switching functionality, but the on-resistance and off-capacitance increase leading to degraded RF efficiency and performance

Engineering Contradiction:
ImproveRF efficiency and performanceVSAvoidon-resistance and off-capacitance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the fundamental operating parameters of the switch by transitioning from solid-state SOI switches to MEMS switches that operate with high voltage (40V) to close and low voltage (0V) to open. This parameter change enables the switch to achieve simultaneously low on-resistance and low off-capacitance, resolving the contradiction between reliability and harmful factors. The high voltage operation allows the MEMS switch to achieve excellent RF performance with FOM at least 1/3 lower than conventional SOI switches.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If a larger number of MEMS switches are controlled using individual control signals, then each switch can be independently controlled, but the routing complexity and footprint increase

Engineering Contradiction:
ImproveIndependent switch control capabilityVSAvoidRouting complexity and footprint
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges multiple control functions into a single integrated MEMS-based driver circuit that can control multiple MEMS switches using a reduced number of control signals. This driver circuit combines the control logic and signal distribution functions, enabling independent control of multiple switches while reducing the overall routing complexity and footprint compared to individual control signal lines for each switch.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The MEMS-based driver circuit is designed with multi-functionality to control multiple MEMS switches using a lesser number of control signals. The driver circuit can selectively activate different switches based on the control signals received, providing universal control capability that reduces the need for dedicated control lines for each switch, thereby reducing routing complexity and footprint.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces unwanted insertion loss and enhances RF efficiency and performance in mobile communication devices by utilizing MEMS switches with lower figure-of-merit compared to SOI switches, thereby improving the overall performance of the device.

Implementation Method 1

A microelectromechanical systems (MEMS) switch may include a movable electrode and a fixed electrode. The MEMS switch may be closed in response to receiving a high driving voltage (e.g., 40 V) and may be opened in response to receiving a low driving voltage (e.g., 0 V).

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS10854411B2Microelectromechanical systems (MEMS) switching circuit and related apparatus
Publication Date: 2020.12.01 QORVO US INC
  • US10854411B2 patent drawing
  • US10854411B2 patent drawing
  • US10854411B2 patent drawing

AI summary

A microelectromechanical systems (MEMS) switching circuit and related apparatus is provided. A MEMS apparatus includes a MEMS switching circuit and a control circuit. The MEMS switching circuit includes a first number of MEMS switches, each configured to close and open based on a high driving voltage and a low driving voltage, respectively. The MEMS switching circuit includes a MEMS-based driver circuit configured to receive a second number of control signals that collectively identify a selected MEMS switch among the first number of MEMS switches. Accordingly, the MEMS-based driver circuit decodes the second number of control signals and causes the selected MEMS switch to close. By using a lesser number of control signals to control a larger number of MEMS switches, it may be possible to reduce control lines between the control circuit and the MEMS switching circuit, thus helping to reduce routing complexity and footprint of the MEMS apparatus.