MEMS Test Probe With Deformable Insertion Coupling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing test probes face limitations in miniaturization, multiple point contact, and durability due to mechanical processing, making it difficult to efficiently connect smaller semiconductor terminals and requiring complex reprocessing when the probe is abraded.
Innovation Solution
A test probe is fabricated using a micro-electromechanical systems (MEMS) process with a first conductive member having a probe shape and a second conductive member with an insertion portion, allowing for simple coupling by deforming the second member to securely attach the first member without soldering, enhancing durability and replaceability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If mechanical processing is used to fabricate the test probe portion, then the fabrication process is simple, but the probe cannot be miniaturized and processed with high precision
Solution Approach 1:
The test probe is divided into two separate conductive members: a first conductive member containing the probe portion formed by MEMS process, and a second conductive member with an insertion portion. This segmentation allows the probe portion to be fabricated with high precision using MEMS while the overall structure remains simple to assemble.
Solution Approach 2:
The first conductive member is inserted into the insertion portion of the second conductive member, creating a nested structure. This allows the precisely-formed probe portion to be housed within a simpler outer structure, combining high precision fabrication with simple overall design.
2Length of moving object
If the test probe portion is made smaller to match smaller terminals, then better contact with small terminals is achieved, but mechanical processing limits further miniaturization
Solution Approach 1:
The mechanical processing method is replaced with a MEMS (micro-electromechanical systems) process for fabricating the probe portion. MEMS enables precise fabrication of micro-scale structures that cannot be achieved through conventional mechanical processing, allowing further miniaturization while maintaining manufacturing precision.
3Reliability
If the test probe portion is processed by mechanical processing, then the fabrication is straightforward, but multiple point contact cannot be realized for efficient electrical connection
Solution Approach 1:
The probe portion is segmented into multiple contact points or a multi-point structure, enabling simultaneous contact with multiple terminals. This segmentation increases electrical contact efficiency while the MEMS process maintains fabrication simplicity through standardized micro-fabrication techniques.
4Ease of repair
If the test probe portion is abraded, then the probe wears out, but processing the whole pin member is inconvenient and time-consuming
Solution Approach 1:
The test probe is segmented into a replaceable first conductive member containing the probe portion and a reusable second conductive member. When the probe portion becomes abraded, only the first conductive member needs to be replaced, not the entire pin member, significantly reducing repair time and improving ease of maintenance.
Solution Approach 2:
The first conductive member with the worn probe portion is discarded or replaced, while the second conductive member is recovered and reused. This approach eliminates the need to reprocess the entire pin member, saving time and resources.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables easy fabrication of fine probes with superior durability and replaceability, ensuring stable electrical connections and reducing the risk of the probe escaping, while allowing for precise fabrication of probe shapes and easy replacement of worn parts.
Implementation Method 1
a fixing and coupling operation in which the first conducive member is fixedly coupled to the second conductive member by deforming a part of the second conductive member
Data Source
AI summary
A method of fabricating a test probe includes a first conductive providing operation in which a first conductive member formed of a conductive metal material is provided, the first conductive member including a probe portion that has a probe shape and is formed in an upper portion of the first conductive member by a micro-electromechanical systems (MEMS) process, a second conductive member providing operation in which a second conductive member formed of a conductive metal material is provided, the second conductive member having an insertion portion formed in an upper portion of the second conductive member for inserting the first conductive member to be coupled to the insertion portion, an insertion operation in which the first conductive member is inserted into the insertion portion of the second conductive member, and a fixing and coupling operation in which the first conducive member is fixedly coupled to the second conductive member by deforming a part of the second conductive member.