Integrated MEMS Transducer Modulus for Differential and Absolute Pressure
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Solution Overview
Problem
Existing differential pressure sensors require additional sensors and processing chips to measure absolute pressures, leading to increased area consumption and costs, and there is a need to detect individual pressures in specific operating conditions for safety monitoring.
Innovation Solution
A transducer modulus with integrated MEMS structures and processing chips that can perform both differential and absolute measurements by using multiple membranes and piezoresistive sensing elements connected in Wheatstone-bridge circuits, allowing for separate deformation and signal processing of environmental pressures P1 and P2.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If additional pressure sensors and processing chips are provided to measure absolute pressures P1 and P2, then the measurement capability is improved, but the area consumption and costs increase
Solution Approach 1:
The patent combines multiple pressure sensing functions (differential and absolute measurements) into a single integrated transducer modulus. The first and second membranes with their respective piezoresistive elements are integrated on one substrate, allowing simultaneous differential pressure measurement (P1-P2) and absolute pressure measurements (P1 and P2) without requiring separate sensor devices, thereby reducing area consumption while maintaining measurement capability
Solution Approach 2:
The transducer modulus is designed with multi-functionality to perform both differential pressure sensing and absolute pressure sensing operations. By configuring the first membrane to be exposed to both P1 and P2 environments and the second membrane to be exposed only to P2, the system can derive both differential (P1-P2) and absolute (P1, P2) pressure measurements from a single device structure
2Adaptability or versatility
If additional pressure sensors and processing chips are provided to measure absolute pressures P1 and P2, then the measurement capability is improved, but the costs increase
Solution Approach 1:
The patent combines multiple pressure sensing functions (differential and absolute measurements) into a single integrated transducer modulus. The first and second membranes with their respective piezoresistive elements are integrated on one substrate, allowing simultaneous differential pressure measurement (P1-P2) and absolute pressure measurements (P1 and P2) without requiring separate sensor devices, thereby reducing area consumption while maintaining measurement capability
Solution Approach 2:
The transducer modulus is designed with multi-functionality to perform both differential pressure sensing and absolute pressure sensing operations. By configuring the first membrane to be exposed to both P1 and P2 environments and the second membrane to be exposed only to P2, the system can derive both differential (P1-P2) and absolute (P1, P2) pressure measurements from a single device structure
3Measurement precision
If a differential pressure sensor is used to monitor differential pressure, then the differential measurement is achieved, but the individual absolute pressures cannot be detected
Solution Approach 1:
The patent combines multiple pressure sensing functions (differential and absolute measurements) into a single integrated transducer modulus. The first and second membranes with their respective piezoresistive elements are integrated on one substrate, allowing simultaneous differential pressure measurement (P1-P2) and absolute pressure measurements (P1 and P2) without requiring separate sensor devices, thereby reducing area consumption while maintaining measurement capability
Solution Approach 2:
The transducer modulus is designed with multi-functionality to perform both differential pressure sensing and absolute pressure sensing operations. By configuring the first membrane to be exposed to both P1 and P2 environments and the second membrane to be exposed only to P2, the system can derive both differential (P1-P2) and absolute (P1, P2) pressure measurements from a single device structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables simultaneous differential and absolute pressure measurements with reduced space and cost requirements, allowing for effective monitoring of environmental pressures and improved safety conditions.
Implementation Method 1
Diffused within the membrane are piezoresistive elements connected together to form a Wheatstone bridge. When subjected to a pressure, the membrane undergoes deformation, causing a variation of resistance of the piezoresistive elements
Implementation Method 2
Diffused within the membrane are piezoresistive elements connected together to form a Wheatstone bridge. A reading electronics is designed to carry out appropriate operations of processing (amongst which operations of amplification and filtering) of said electrical quantity so as to supply an electrical output signal
Data Source
AI summary
A transducer modulus, comprising: a substrate; a cap on the substrate, defining a chamber; and a sensor modulus in the chamber, integrating a first MEMS transducer facing the chamber, and a second MEMS transducer facing the supporting substrate. The cap has a first opening that forms a path for access of the first environmental quantity exclusively towards a sensitive element of the first transducer, and the supporting substrate has a second opening that forms a path for access of the second environmental quantity exclusively towards a sensitive element of the second transducer.