MEMS Tunable Laser With Rotational and Translational Grating Deflection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current tunable lasers for the mid-infrared range face challenges in miniaturization, fast tunability, and high optical coupling efficiency, particularly due to the limitations of Fabry-Perot filters and Fourier transformation spectrometers, which restrict spectral resolution and increase complexity and cost.
Innovation Solution
A micromechanically produced optical device with a diffraction grating and electrostatic drivers enables continuous wavelength tuning in the mid-infrared range by combining rotational and translational deflections of the grating, allowing for high optical quality and avoidance of mode hopping, while using MEMS technology to produce large diffraction gratings and electrostatic drives for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If Fabry-Perot filters are used for wavelength tuning, then spectral resolution can be achieved, but device complexity and manufacturing cost increase significantly
Solution Approach 1:
The patent combines multiple Fabry-Perot filters with different free spectral ranges into a single integrated filter array, merging their wavelength-selective functions while reducing the need for multiple separate filters and precision mechanical actuators
Solution Approach 2:
The filter array is designed to provide multiple free spectral ranges simultaneously, making a single device capable of achieving both broad tuning range and high spectral resolution without requiring separate filter systems
2Adaptability or versatility
If precision-mechanically produced motors are used to offset the filter and mirror, then tunability is achieved, but miniaturization is limited
Solution Approach 1:
The patent replaces precision-mechanical motors with electrostatic actuators that can be fully integrated into the MEMS structure, eliminating the need for external mechanical drive systems and enabling significant miniaturization
3Reliability
If large dimensions are used for mirrors or diffraction gratings to seal off the resonator, then optical coupling efficiency is improved, but miniaturization is reduced
Solution Approach 1:
The patent uses a vertically stacked three-dimensional resonator configuration where the optical path is folded back on itself, allowing sufficient optical interaction length and coupling efficiency within a compact footprint by utilizing the vertical dimension
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution achieves a high degree of miniaturization, simplicity, and precision in tuning lasers within the mid-infrared range, enabling flexible wavelength adjustment without mode hopping and improving optical coupling efficiency.
Implementation Method 1
a diffraction grating (3) for diffracting light
Implementation Method 2
the driver is an electrostatic driver which includes at least one electrode arrangement
Data Source
AI summary
A micromechanically produced optical device includes:a carrier for carrying the micromechanically produced device;a diffraction grating for diffracting light;a plate for carrying the diffraction grating; anddeflectors for deflecting the plate in relation to the carrier, the deflectors comprising bearings for movably bearing the plate and a driver for moving the plate;the deflectors being configured for rotational deflection of the plate and for translational deflection of the plate.