MEMS Variable Capacitor with Movable Electrode Switch

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Solution Overview

Problem

Existing capacitors lack the ability to easily adjust capacitance over a wide range, which is necessary for communication equipment that requires varying frequency bands.

Innovation Solution

A variable capacitor design featuring multiple capacitor units connected in parallel, with a movable electrode that acts as a switch to selectively connect different capacitors, allowing for precise adjustment of capacitance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a conventional capacitor design is used, then the structure is simple, but the capacitance cannot be adjusted over a wide range

Engineering Contradiction:
Improvecapacitance adjustment rangeVSAvoidcapacitor structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The capacitor is divided into multiple capacitor units connected in parallel, where each unit can be independently controlled. This segmentation allows the total capacitance to be adjusted by selectively connecting or disconnecting individual units, thereby achieving a wide capacitance adjustment range while maintaining a manageable structural complexity through modular design.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If multiple capacitors are integrated into a small space, then the capacitance adjustment precision is improved, but the manufacturing difficulty increases

Engineering Contradiction:
Improvecapacitance variable precisionVSAvoidfabrication process
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The movable electrode serves dual functions: it acts as both a capacitor electrode and a switch element. When the movable electrode moves between different positions, it selectively connects to different fixed electrodes, thereby functioning as both the active capacitor component and the switching mechanism. This multi-functionality reduces the number of separate components needed, simplifying the fabrication process while maintaining high capacitance adjustment precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables high precision capacitance adjustment over a wide range in a small size, integrating two capacitors into a single unit, thus meeting the requirements for communication equipment.

Implementation Method 1

a movable electrode between the first and second capacitor electrodes, and a driving electrode to move the movable electrode

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS9548162B2Capacitor, MEMS device, and method of manufacturing the MEMS device
Publication Date: 2017.01.17 LG INNOTEK CO LTD
  • US9548162B2 patent drawing
  • US9548162B2 patent drawing
  • US9548162B2 patent drawing

AI summary

Disclosed is a capacitor. The capacitor includes a plurality of capacitor units connected to each other in parallel. The capacitor unit includes a first capacitor, a second capacitor connected to the first capacitor in parallel, and a switch selectively connected to the first capacitor or the second capacitor.