Short-Cavity MEMS-VCSEL Tunable Laser Design

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Solution Overview

Problem

Current tunable lasers, such as FDML and ECTL, suffer from limited imaging range, spectral resolution, and speed limitations due to their multi-longitudinal mode operation, non-monolithic construction, and inflexibility in center wavelength and tuning speed, which restricts their application in high-resolution imaging and spectroscopic systems.

Innovation Solution

A short-cavity MEMS-VCSEL with a large free spectral range, optimized mirror and gain region design, and MEMS-based tuning mechanism for single transverse and longitudinal mode operation, enabling wide tuning range, high output power, and variable tuning speed, combined with a semiconductor optical amplifier for spectrally shaped operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multi-longitudinal mode operation is used in tunable lasers, then tuning range is increased, but spectral resolution and imaging range deteriorate

Engineering Contradiction:
Improvetuning rangeVSAvoidspectral resolution
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The laser cavity is segmented into a short fixed section and a variable length section. The short cavity portion provides stable single longitudinal mode operation for high spectral resolution, while the variable length section (tuned by MEMS mirror) extends the overall tuning range by changing the optical path length without compromising mode stability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A MEMS-based tunable mirror is introduced as an intermediary element to control the optical cavity length. This mirror allows precise adjustment of the round-trip optical path, enabling continuous wavelength tuning while maintaining single-mode operation through stable cavity resonance conditions.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If external cavity design is used to increase tuning range, then device complexity and manufacturing cost increase

Engineering Contradiction:
Improvetuning rangeVSAvoiddevice complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The invention merges the gain medium, cavity mirrors, and tuning mechanism into a single integrated VCSEL structure. The MEMS mirror is directly integrated with the laser cavity, eliminating the need for separate external cavity components and reducing overall device complexity while maintaining wide tuning capability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The VCSEL structure serves multiple functions simultaneously: it provides optical gain, defines the resonant cavity, and interfaces with the MEMS tuning mechanism. This multi-functionality reduces the number of discrete components needed and simplifies the overall device architecture.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If long cavity length is used to achieve wide tuning range, then tuning speed decreases due to increased round-trip time

Engineering Contradiction:
Improvetuning rangeVSAvoidtuning speed
Core Design Contradiction:
Adaptability or versatilityVSSpeed

Solution Approach 1:

The cavity length is made dynamically adjustable through the MEMS mirror, which can rapidly change the optical path length. This dynamic tuning mechanism allows the system to achieve wide tuning ranges by varying the effective cavity length without being constrained by a fixed long physical cavity, thereby maintaining high tuning speeds.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

A thin MEMS mirror membrane is used to control the cavity length. The thin-film nature of the MEMS structure enables rapid actuation and response, allowing fast tuning speeds while the variable optical path provided by the thin film's movement achieves the required wide tuning range.

Inventive Principle:
Principle #30Flexible shells and thin films

4Ease of manufacture

If non-monolithic construction is used for tunable lasers, then fabrication flexibility is improved, but manufacturing precision and reliability deteriorate

Engineering Contradiction:
Improvefabrication flexibilityVSAvoidmanufacturing precision
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The gain region, cavity mirrors, and tuning mechanism are merged into a single monolithic VCSEL structure fabricated using standard semiconductor processes. This integration ensures precise alignment and consistent performance while maintaining fabrication flexibility through established semiconductor manufacturing techniques.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention uses parameter changes in the semiconductor layers (composition, thickness, doping) during monolithic fabrication to achieve wavelength tuning and cavity design optimization. This approach maintains manufacturing precision through controlled epitaxial growth while providing the flexibility to design different laser characteristics.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a tunable laser with extended dynamic coherence length, high axial resolution, and flexible tuning capabilities, enhancing imaging range and spectral resolution in applications like SS-OCT and spectroscopy, while maintaining reliability and cost-effectiveness.

Implementation Method 1

A short-cavity MEMS-VCSEL with a large free spectral range, optimized mirror and gain region design, and MEMS-based tuning mechanism

Methodology Applied
Scientific EffectMEMS (Microelectromechanical Systems): Microelectromechanical Systems

Implementation Method 2

Quantum well tunable short cavity laser

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 3

combined with a semiconductor optical amplifier for spectrally shaped operation

Methodology Applied
Scientific EffectStimulated emission: Laser

Data Source

PatentEP2878046B1Quantum well tunable short cavity laser
Publication Date: 2022.03.09 THORLABS INC
  • EP2878046B1 patent drawingFigure 1~3
  • EP2878046B1 patent drawingFigure 4~5
  • EP2878046B1 patent drawingFigure 6~7

AI summary

A tunable source includes a short cavity laser with quantum well gain region supporting wide tuning range. The short cavity laser with a quantum well gain region, large free spectral range cavity, fast tuning response and single transverse, and longitudinal mode operation is disclosed. Both electrical and optical pumping of the short cavity laser are presented.