MEMS Transducer Vertical Sections and Corrugations
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Solution Overview
Problem
Existing MEMS loudspeakers face limitations in sound power, particularly at low frequencies, due to the planar membrane design which restricts displacement and area requirements.
Innovation Solution
A MEMS transducer with a vibratable membrane featuring vertical and horizontal sections, where the vertical sections are substantially parallel to the emission direction and can be induced to vibrate horizontally by driving an electrode, and the sections include corrugations and/or weakened regions to enhance vibrational behavior.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a planar membrane design is used, then the structure is simple and manufacturing is easy, but sound power is limited particularly at low frequencies
Solution Approach 1:
The membrane is divided into multiple vertical sections that can move independently, allowing each section to contribute to sound generation. This segmentation enables increased volume flow on a small surface area, thereby increasing sound power while maintaining a compact MEMS structure that remains manufacturable
Solution Approach 2:
The membrane transitions from a planar 2D structure to a 3D structure with vertical sections that move laterally. This dimensional change allows the membrane to displace larger volumes of air without increasing the chip footprint, thereby increasing sound power while maintaining ease of manufacture through standard MEMS fabrication processes
2Power
If large-area membranes are used to increase sound power, then sound pressure level improves, but the device size increases beyond typical MEMS dimensions
Solution Approach 1:
The invention uses vertical sections that move laterally in the horizontal plane, effectively utilizing the third dimension to increase the swept volume. This allows large displacement volumes to be achieved within a small chip footprint, increasing sound power without increasing device size
Solution Approach 2:
Multiple vertical sections are arranged on a small chip area, each contributing to the total volume displacement. The segmented structure allows the sum of individual section displacements to achieve large effective area for sound generation while maintaining compact overall device dimensions
3Power
If large displacements of at least 100 μm are required for sufficient sound power, then sound pressure level improves, but the mechanical complexity and difficulty of achieving such displacements in MEMS increases
Solution Approach 1:
The membrane is designed to move laterally in the horizontal plane rather than vertically, utilizing the lateral dimension for displacement. This lateral movement geometry achieves large effective displacement with simpler mechanical constraints, reducing device complexity while maintaining sound power
Solution Approach 2:
The vertical sections are designed with curved profiles and the membrane incorporates corrugations that facilitate smooth lateral movement. The curved geometry reduces stress concentrations and simplifies the mechanical requirements for achieving large displacements, thereby reducing device complexity
4Stability of the object's composition
If corrugations are added to the membrane, then intrinsic stress is reduced and vibrational behavior is improved, but the manufacturing process becomes more complex
Solution Approach 1:
The corrugation geometry parameters (depth, width, spacing) are optimized to achieve the desired stress distribution and vibrational characteristics. By carefully selecting these parameters, the membrane achieves reduced intrinsic stress and improved performance while remaining compatible with standard MEMS fabrication processes, thus maintaining ease of manufacture
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves higher sound power and simplified drive, allowing for increased displacement of fluid volumes and improved audio quality, while maintaining a compact and cost-effective structure.
Implementation Method 1
They are induced to vibrate, for example, by means of piezoelectric, electromagnetic or electrostatic actuators
Implementation Method 2
a vibratable membrane for generating or receiving pressure waves in a vertical emission direction
Data Source
AI summary
In a first aspect, the invention relates to a MEMS transducer which comprises a vibratable membrane for generating or receiving pressure waves in a vertical emission direction, wherein the vibratable membrane is held by a carrier and the vibratable membrane exhibits vertical sections which are substantially parallel to the emission direction or reception direction and comprise at least one layer of an actuator material. The vibratable membrane is preferably in contact with an electrode at the end such that the vertical sections can be induced to vibrate horizontally by driving the electrode or such that an electrical signal can be generated at the electrode when the vertical sections are induced to vibrate horizontally. The vertical sections and/or the horizontal sections thereby exhibit one or more corrugations and/or weakened regions. In a further aspect, the invention relates to a method for producing the MEMS transducer according to the invention.