MEMS Vibration Device Electrostatic Catching Control
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Solution Overview
Problem
Vibration devices using MEMS technology face issues with foreign matter generation during the catching and releasing operations, which can hinder proper operation due to mechanical contact and subsequent adherence of foreign matter, affecting the distance between the movable body and the catch and release mechanism.
Innovation Solution
The method involves controlling the applied voltage waveform to reduce collision speed between the movable body and the stopper, by extending the time from the rise start to the rise end of the voltage for catching and ensuring the time from the fall start to the fall end for releasing is also extended, thereby reducing the generation of foreign matter and maintaining proper catching operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the movable body is caught by mechanical contact with the catch and release mechanism, then the catching operation can be achieved, but foreign matter is generated and may adhere to the movable body or mechanism
Solution Approach 1:
The patent replaces the mechanical contact-based catch and release mechanism with an electrostatic field-based mechanism. The movable body is caught and released by applying electrostatic attraction between the movable body and the electrode, eliminating mechanical contact and thus preventing foreign matter generation from friction and impact.
Solution Approach 2:
The patent controls the electrostatic attraction by adjusting voltage parameters. By applying a first voltage to catch the movable body and a second voltage (different from the first) to release it, the system achieves reliable catching operations without mechanical contact, thereby preventing foreign matter generation.
2Object-generated harmful factors
If the voltage rise time is extended to reduce collision speed, then foreign matter generation is suppressed, but the catching operation time increases
Solution Approach 1:
The patent optimizes voltage parameters including rise time, fall time, amplitude, and duty cycle to achieve the right balance. By carefully controlling these parameters, the system extends voltage rise time enough to suppress foreign matter generation while keeping the overall catching operation time within acceptable limits through efficient voltage waveform design.
Solution Approach 2:
The patent uses periodic voltage application with controlled duty cycles. The voltage is applied in periodic pulses with optimized duration and frequency, allowing the system to extend rise time for foreign matter suppression while maintaining overall operational efficiency through the periodic nature of the catching operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses the generation of foreign matter, ensuring accurate and reliable catching operations by minimizing the impact of collisions and maintaining the distance between the movable body and the electrode, thus enhancing the performance of the vibration device.
Implementation Method 1
a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force
Data Source
AI summary
According to one embodiment, a method for controlling a vibration device includes a movable body capable of vibrating in a first direction, and a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction, wherein in a condition that tc is a time from a rise start time point to a rise end time point of an applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and td is a period of the free vibration in the first direction of the movable body, the time tc is longer than the time td.