MEMS Viscosity Sensor With Dual Piezoelectric Resonators
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Solution Overview
Problem
Current fluid viscosity measuring devices face challenges in achieving accurate, reliable, and cost-effective miniaturization for real-time measurement, particularly in the medical and biotechnology sectors, where precise fluid property analysis is crucial.
Innovation Solution
A microelectromechanical systems (MEMS) based fluid viscosity measuring device is developed, utilizing a support structure with a driving resonator and a detection resonator, both comprising piezoelectric bodies, which are designed to resonate at the same frequency, allowing for precise measurement of fluid viscosity through the interaction between the resonators and the fluid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If fluid viscosity measuring devices are miniaturized for real-time measurement, then measurement speed and applicability improve, but manufacturing complexity and reliability deteriorate
Solution Approach 1:
The device is segmented into two independent resonators (driving resonator and detection resonator) that operate separately but interact through the fluid. Each resonator can be independently fabricated and tuned, allowing for optimized manufacturing of each component while maintaining overall device functionality and reliability.
Solution Approach 2:
The resonators are designed to operate at the same natural frequency, creating a resonant coupling condition. By tuning the resonant frequency parameter of both resonators to match, the device achieves enhanced sensitivity for real-time viscosity measurement while maintaining manufacturing feasibility through standard MEMS fabrication processes.
2Measurement precision
If resonators are designed to resonate at the same frequency for accurate measurement, then measurement precision improves, but device complexity increases
Solution Approach 1:
Both resonators are designed with identical structural parameters and materials, giving them the same natural frequency. This homogeneous design simplifies the manufacturing process as both resonators can be fabricated using the same process parameters, while still achieving the desired resonant coupling for precise viscosity measurement.
Solution Approach 2:
The detection resonator is essentially a copy of the driving resonator, with identical structure and properties. This copying approach ensures both resonators have the same natural frequency, enabling accurate measurement through resonant coupling without requiring complex differential design.
3Reliability
If piezoelectric bodies are used in both resonators for driving and detection, then measurement reliability improves, but manufacturing cost increases
Solution Approach 1:
The piezoelectric body serves multiple functions: it acts as both the actuator (converting electrical signals to mechanical vibration) and the sensor (converting mechanical vibration back to electrical signals) in each resonator. This multi-functionality reduces the need for separate components, simplifying manufacturing while maintaining measurement reliability.
Solution Approach 2:
The driving and detection functions are merged into a single piezoelectric body within each resonator. The same piezoelectric material and structure are used for both actuation and sensing, reducing component count and manufacturing complexity while ensuring consistent performance and reliable measurements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device provides reliable and real-time viscosity measurement without requiring prior knowledge of fluid properties, enhancing measurement accuracy and ease of manufacturing, making it suitable for industrial and medical applications.
Implementation Method 1
the driving resonator comprises a first piezoelectric body, wherein the detection resonator comprises a second piezoelectric body
Implementation Method 2
MEMS resonators are micro devices that exhibit a maximum mechanical displacement by resonating when a signal corresponding to the resonance frequency of a structure is inputted
Implementation Method 3
the driving resonator comprises a first piezoelectric body, wherein the detection resonator comprises a second piezoelectric body
Data Source
AI summary
Provided is a fluid viscosity measuring device including a support structure having an opening part, the opening part penetrating the support structure in a first direction, a driving resonator fixed to the support structure and extending to overlap the opening part, and a detection resonator fixed to the support structure and extending parallel to the driving resonator, the detection resonator being spaced apart from the driving resonator in the first direction. The driving resonator includes a first piezoelectric body. The detection resonator includes a second piezoelectric body. The first piezoelectric body and the second piezoelectric body have the same shape.