MEMS Waveguide Switch for Terahertz Routing

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Solution Overview

Problem

Current sub-millimeter wave switches are not available with low loss characteristics, leading to the use of bulky and power-hungry motors with flip mirrors for calibration in remote-sensing systems.

Innovation Solution

A Micro-Electro-Mechanical System (MEMS) waveguide switch is developed, featuring a motor coupled to a switching body with a connector waveguide, rotating between two positions to connect different pairs of waveguides without mechanical or electrical contact, utilizing an electromagnetic bandgap (EBG) surface for isolation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If MEMS waveguide switches are used to achieve low loss switching, then insertion loss is reduced, but mechanical contact between waveguide walls increases the risk of stiction and failure

Engineering Contradiction:

Improveinsertion lossVSAvoidstiction risk

Core Design Contradiction:

Loss of energyVSReliability

Solution Approach 1:

The patent replaces mechanical contact-based switching with a contactless electromagnetic field-based switching mechanism. The switch uses electrostatic actuation to move a movable wall that opens or closes waveguide ports without mechanical contact between opposing walls, eliminating stiction while maintaining low insertion loss through precise electromagnetic field control and port alignment.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If contactless switching is implemented to avoid stiction, then reliability is improved, but mechanical and electrical contact is eliminated which may affect switching performance

Engineering Contradiction:

Improvestiction avoidanceVSAvoidswitching performance

Core Design Contradiction:

ReliabilityVSLoss of energy

Solution Approach 1:

The patent introduces an electromagnetic field as an intermediary between the actuator and the movable wall. Electrostatic forces generated by applied voltage control the position of the movable wall, enabling contactless actuation while maintaining precise control over waveguide port alignment and electromagnetic field distribution, thus preserving switching performance without mechanical contact.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If bulky motors with flip mirrors are used for calibration, then switching function is achieved, but device size and power consumption increase

Engineering Contradiction:

Improvecalibration functionVSAvoiddevice size

Core Design Contradiction:

ReliabilityVSWeight of moving object

Solution Approach 1:

The patent integrates the waveguide switch directly into the calibration path within the existing instrument architecture. The compact waveguide-based switch is nested within the instrument's waveguide structure, eliminating the need for bulky external flip mirror assemblies while maintaining the calibration function through integrated waveguide routing and port switching.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent replaces bulky mechanical flip mirror assemblies with a compact electrostatically actuated waveguide switch. The contactless electromagnetic switching mechanism eliminates the need for large motors and mirrors, reducing device size and power consumption while maintaining reliable calibration functionality through precise waveguide port control.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MEMS waveguide switch achieves a measured insertion loss of less than 2.5 dB and isolation greater than 30 dB between 550-750 GHz, with the ability to route electromagnetic waves without contact, thus avoiding issues like stiction and improving reliability.

Implementation Method 1

The connector waveguide is surrounded by an electromagnetic bandgap (EBG) surface used to isolate the electromagnetic wave without mechanical or electrical contact.

Methodology Applied

Scientific EffectElectromagnetic bandgap: