Immersion Lithography Meniscus Vibration for Bubble Control
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Solution Overview
Problem
The use of immersion fluids in lithographic apparatuses leads to defects on substrates due to bubble formation when droplets collide with the meniscus, limiting throughput as reducing substrate speed stabilizes the meniscus but reduces processing efficiency.
Innovation Solution
A fluid handling system that vibrates the meniscus at frequencies between 30 Hz and 9,500 Hz to alter the interaction between droplets and the meniscus, preventing bubble formation and allowing higher substrate speeds without increasing defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate speed is reduced to stabilize the meniscus, then bubble formation is reduced, but the throughput of the lithographic apparatus is limited
Solution Approach 1:
The patent applies mechanical vibration to the meniscus at frequencies between 30 Hz and 9,500 Hz using a vibration mechanism. This vibration alters the interaction between droplets and the meniscus, preventing bubble formation while allowing higher substrate speeds. The vibration creates dynamic conditions that promote gas escape during droplet collisions, resolving the contradiction between stability and throughput.
2Productivity
If the substrate speed is increased to improve throughput, then processing efficiency is improved, but droplet collisions with the meniscus increase bubble formation
Solution Approach 1:
The vibration mechanism oscillates the meniscus at frequencies from 30 Hz to 9,500 Hz, creating dynamic surface conditions that prevent bubble formation even during high-speed substrate movement. The vibration ensures that gas can escape during droplet collisions, allowing increased throughput without the harmful effect of bubble formation.
Solution Approach 2:
The patent changes the physical state of the meniscus by introducing vibration at specific frequencies. This parameter change transforms the meniscus from a static surface prone to bubble formation into a dynamic surface that promotes gas escape, enabling high-speed processing without defects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The vibration of the meniscus reduces bubble generation in the immersion liquid, enabling increased throughput while minimizing defects on the substrate by ensuring gas escape during droplet collisions.
Implementation Method 1
a mechanism configured to vibrate a vibration component in contact with the immersion liquid in use at a frequency of greater than or equal to approximately 30 Hz and less than 9,500 Hz
Data Source
AI summary
A fluid handling system that includes a liquid confinement structure configured to confine immersion liquid to a space between at least a part of the liquid confinement structure and a surface of a substrate. The fluid handling system also includes a mechanism configured to vibrate a vibration component in contact with the immersion liquid.