Merapto Compound Cleaning Liquid for Copper Corrosion Prevention
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Solution Overview
Problem
Current cleaning liquids used in semiconductor manufacturing often cause corrosion of copper and copper-containing metals, leading to issues such as changes in resistance and wire breakage during the cleaning process, despite the use of anticorrosive agents like alcohols with mercapto groups.
Innovation Solution
A cleaning liquid containing specific mercapto compounds, such as aromatic mercapto compounds and linear mercapto alcohols, which inhibit corrosion of copper and copper-containing metals by forming stable complexes, thereby preventing resistance changes and wire breakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an acidic or alkaline cleaning liquid is used to eliminate residual matter, then cleaning effectiveness is improved, but corrosion of copper and copper-containing metals worsens
Solution Approach 1:
The patent introduces a mercapto compound as an intermediary substance that mediates between the cleaning liquid and copper surfaces. The mercapto compound forms a protective complex with copper, acting as a barrier that prevents direct contact between the corrosive cleaning liquid and the metal surface, thereby eliminating corrosion while maintaining cleaning effectiveness
Solution Approach 2:
The invention creates a composite protective layer on copper surfaces through the formation of mercapto-copper complexes. This composite structure combines the cleaning properties of the cleaning liquid with the protective properties of the mercapto compound, achieving both effective cleaning and corrosion prevention simultaneously
2Object-affected harmful factors
If conventional anticorrosive agents (alcohols with mercapto groups) are used, then some corrosion prevention is achieved, but the anticorrosive effect is insufficient
Solution Approach 1:
The patent optimizes key parameters of the mercapto compound including the carbon chain length (x ≥ 3), the positions of hydroxyl and mercapto groups on the aromatic ring, and the overall molecular structure. These parameter optimizations enhance the compound's ability to form stable complexes with copper, significantly improving the anticorrosive effect compared to conventional agents
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of these mercapto compounds significantly enhances the anticorrosive effect, effectively preventing corrosion and maintaining the integrity of copper-based wiring during the cleaning process, as demonstrated by reduced corrosion rates in anticorrosion tests.
Implementation Method 1
mercapto compounds, such as aromatic mercapto compounds and linear mercapto alcohols, which inhibit corrosion of copper and copper-containing metals by forming stable complexes
Data Source
AI summary
A method of cleaning a substrate having a metal layer including copper or a copper-containing alloy, the method including cleaning the substrate using a cleaning liquid that includes a mercapto compound represented by one or both of the following formulas (1) and (2), and a solvent containing water and a water-soluble organic solvent:in which R represents a substituent group; m is an integer of 1 to 3; and n is an integer of 0 to 3, when m is 2 or 3, R may be the same or different;HS—(CH2)x—OH (2),in which x is an integer of no less than 3.