Mesa Gauge Force Detection with Adjustable Bridge Circuit
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Solution Overview
Problem
Force detection devices with mesa gauges have limited design flexibility and non-linear output characteristics due to the fixed geometry of mesa gauges and their sealing structures, which affects the sensitivity and linearity of force detection.
Innovation Solution
A force detection device with a substrate and a force transmission block, featuring mesa gauges forming a bridge circuit and a connection region doped with impurities, allowing for adjustable lengths of the mesa gauges and the introduction of fixed resistors in parallel to improve linearity by canceling out non-linear relationships between stress and resistance values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If mesa gauges are disposed correspondingly to sides of a rectangle to form a bridge circuit, then the force detection device achieves effective force transmission and high sensitivity, but the design flexibility is limited because the length of each mesa gauge is automatically determined and sensitivity can be adjusted only by changing the width
Solution Approach 1:
The patent divides the bridge circuit configuration into independent mesa gauge units that can be selectively arranged. Instead of requiring all four sides of a rectangle to be uniformly configured, the invention allows selective placement of mesa gauges on specific sides (e.g., only opposite sides or specific positions), enabling flexible design while maintaining the bridge circuit functionality for force detection.
2Measurement precision
If multiple mesa gauges are sealed all around by a force transmission block, then the force detection device achieves highly-sensitive characteristics, but the non-linear relationship between stress and electrical resistance value deteriorates output characteristic linearity
Solution Approach 1:
The patent extracts the mesa gauges from the fully sealed configuration and positions them specifically on the principal plane of the substrate where stress distribution is more uniform. By placing mesa gauges only on specific locations (e.g., center regions or specific sides) rather than sealing all around, the invention reduces the non-linear stress effects while maintaining effective force transmission to the active sensing elements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances design flexibility and linearity of output characteristics, improving sensitivity and reducing zero-point offset characteristics by allowing for adjustable mesa gauge lengths and parallel connection of fixed resistors, effectively transmitting compressive stress and enhancing force detection accuracy.
Implementation Method 1
A mesa gauge has a piezoresistive effect and an electric resistance value varies with stress. The force detection device is configured to detect a force by exploiting a variance in electrical resistance value.
Implementation Method 2
a connection region arranged on the principal plane and doped with an impurity
Data Source
AI summary
A force detection device includes: a substrate; and a force transmission block. The substrate includes: a mesa gauge arranged on a principal plane of the substrate and providing a bridge circuit; a connection region arranged on the principal plane; and a sealing portion surrounding all around the mesa gauge and connected to the force transmission block. The mesa gauge includes: a first mesa gauge extending in a first direction; and a second mesa gauge extending in a second direction and spaced apart from the first mesa gauge. The connection region electrically connects the one end of the first mesa gauge and the one end of the second mesa gauge.