Cleaning Mesa Sidewalls via Curable Material Spreading
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Solution Overview
Problem
In nanoimprint lithography, extrusions on the mesa sidewalls of templates grow and can cause defects during the semiconductor fabrication process, leading to lower device yields, and existing cleaning methods require frequent template exchange, which reduces throughput.
Innovation Solution
A method and system for cleaning mesa sidewalls of templates by depositing a curable material that spreads up the sidewalls and is cured before contacting the recessed surface, effectively removing extrusions without significantly impacting throughput, using a nanoimprint lithography system with a fluid dispenser and radiation source to form cured material that encapsulates and separates the extrusions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If frequent template exchange is used to remove extrusions, then cleaning effectiveness is improved, but productivity deteriorates
Solution Approach 1:
The curable material is applied to the template before the extrusion formation becomes severe, performing cleaning action in advance. The material is cured and removed periodically during the imprinting process, preventing extrusion accumulation that would otherwise require template replacement.
Solution Approach 2:
A curable material acts as an intermediary substance that temporarily adheres to the template surface, captures extrusions through adhesion, and is then removed as a unified structure. This mediator enables cleaning without direct mechanical contact or template replacement.
2Manufacturing precision
If template cleaning is performed to remove extrusions, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The curable material undergoes phase transition from liquid to solid state through curing, enabling it to capture and hold extrusions. The solidified material forms a structured coating that adheres to the template and encapsulates extrusions, facilitating their removal as a unified structure.
Solution Approach 2:
The mechanical process of template replacement is replaced with a chemical/adhesive process using curable material. Instead of physically removing and replacing templates, the system uses material deposition, curing, and removal cycles to achieve cleaning, reducing system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces the amount of extrusions on the mesa sidewalls, preventing defects and extending the template's life without substantial impact on production efficiency, allowing for continuous use and improved yield.
Implementation Method 1
the curable material spreads up the mesa sidewalls
Implementation Method 2
forming cured material by exposing the curable material to actinic radiation
Data Source
AI summary
A system and method for cleaning mesa sidewalls of a template. Curable material may be deposited in a cleaning drop pattern onto a non-yielding imprint field of one of: a device yielding substrate; and a non-yielding substrate. The template may be brought into contact with the curable material. The template has: a recessed surface; a mesa extending from the recessed surface; and wherein the mesa sidewalls connect the recessed surface to the mesa. A relative position of the template to the cleaning drop pattern may be such that the curable material spreads up the mesa sidewalls and does not contact the recessed surface. Cured material may be formed by exposing the curable material to actinic radiation after the curable material has spread up the mesa sidewalls, and before the curable material contacts the recessed surface. The template may be separated from the cured material.