Mesa Template Sidewall Coating for Nanoimprint Defect Prevention
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Solution Overview
Problem
In nanoimprint lithography, the buildup of material on mesa sidewalls of templates leads to defects during subsequent processing due to repeated cycles, causing irregular height variations and contamination.
Innovation Solution
A method involving a template with a mesa structure, where a photocurable material is deposited and cured to form a thick extrusion on the sidewalls, preventing actinic radiation from reaching the liquid extrusions and allowing them to evaporate, thus preventing contamination and defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the template is used repeatedly over multiple cycles, then productivity is improved, but material buildup occurs on mesa sidewalls causing defects
Solution Approach 1:
A coating layer is deposited on the mesa sidewalls before the imprint process begins. This preliminary coating prevents material buildup during subsequent imprint cycles, allowing the template to be used repeatedly without contamination or defects.
Solution Approach 2:
The physical and chemical properties of the mesa sidewalls are modified by depositing a coating layer with different surface characteristics. This changes the interaction between the template and deposited material, preventing adhesion and buildup during repeated use.
2Productivity
If the template is used for multiple imprint cycles, then productivity increases, but defects occur due to material buildup
Solution Approach 1:
The coating layer is applied in advance to the mesa sidewalls to prevent material buildup before the imprint process starts. This ensures that subsequent imprint cycles maintain consistent pattern quality without defects caused by contamination or extrusions.
Solution Approach 2:
By modifying the surface properties of the mesa sidewalls through coating deposition, the interaction with deposited material is changed. This prevents adhesion and maintains manufacturing precision across multiple imprint cycles.
3Reliability
If actinic radiation reaches liquid extrusions on sidewalls, then curing occurs causing contamination, but preventing radiation access is needed
Solution Approach 1:
A coating layer is introduced as an intermediary between the actinic radiation and the liquid extrusions on the mesa sidewalls. This coating prevents the radiation from reaching and curing the material, thereby preventing contamination while maintaining the template's functional structure.
Solution Approach 2:
The harmful effect of actinic radiation on the liquid extrusions is eliminated by removing the radiation's ability to reach the material. The coating acts as a barrier that extracts or blocks the radiation pathway, preventing unwanted curing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively prevents material buildup on the template sidewalls, reducing defects and ensuring clean separation from the substrate, enhancing the reliability and quality of subsequent processing steps.
Implementation Method 1
curing the photocurable material to form a cured thin film on the top surface of the mesa and to form a thick cured extrusion on at least the portion of the side surface of the mesa
Implementation Method 2
preventing actinic radiation from reaching the liquid extrusions
Data Source
AI summary
A method of manufacturing a template including a mesa on a second side is disclosed. The method can include depositing a first coating on the second side, depositing a photocurable material over a top of the mesa, contacting the photocurable material with a second surface to cause the photocurable material to cover the top surface of the mesa and at least a portion of a side of the mesa, curing the photocurable material to form a cured film on the top surface and to form a cured extrusion on at least a portion of the side surface, the cured extrusion is thicker than the cured film, etching the top surface of the mesa to remove the first coating and the cured film from the top surface, and removing the cured extrusion to form the template with the first coating on the side surface.