Mesh Ring Coating Liquid Collector Prevents Exhaust Clogging
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Solution Overview
Problem
The existing liquid processing apparatuses face challenges in preventing the clogging of exhaust paths due to filamentous or flocculent foreign substances generated during the spin coating process, especially when high-viscosity coating liquids are used, leading to contamination and inadequate exhaust pressure.
Innovation Solution
A liquid processing apparatus is designed with a cylindrical mesh ring acting as a coating liquid collector, fixed to a cylindrical wall portion, which collects and dilutes the resist liquid with a solvent, preventing clogging by ensuring the solvent flows through the mesh ring's openings and maintaining desired exhaust pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a coating liquid collector is provided below the downwardly-extending wall of the inner cup, then coating liquid can be collected and diluted with solvent, but the exhaust path may become clogged by filamentous or flocculent foreign substances
Solution Approach 1:
The cup is divided into outer cup and inner cup with downwardly-extending wall, creating separate functional zones. The coating liquid collector is positioned below the inner cup's wall, segmenting the liquid collection function from the main exhaust path, allowing solvent to flow through the mesh ring and dilute foreign substances without blocking the exhaust path.
Solution Approach 2:
A mesh ring is introduced as an intermediary component between the exhaust path and the coating liquid collector. The mesh ring allows solvent to pass through while filtering and diluting foreign substances, preventing them from clogging the exhaust path. The mesh ring acts as a mediator that separates the harmful substances from the exhaust flow.
2Manufacturing precision
If high-viscosity coating liquids are used, then better coating quality can be achieved, but filamentous or flocculent foreign substances are generated that clog exhaust paths
Solution Approach 1:
The harmful filamentous or flocculent foreign substances generated from high-viscosity coating liquids are converted into a beneficial dilution effect. The solvent flows through the mesh ring, diluting these foreign substances and transforming them from clogging hazards into a flushing mechanism that maintains exhaust path clarity while allowing high-viscosity coating liquids to be used for better coating quality.
Solution Approach 2:
The viscosity parameter of the coating liquid is maintained high for quality coating, but the solvent flow parameter is introduced to change the effective viscosity and flow characteristics in the collection area. The solvent dilutes the high-viscosity coating liquid and its byproducts, allowing the system to benefit from high-viscosity coating properties without suffering from clogging issues.
3Ease of repair
If the coating liquid collector is fixed to the cylindrical wall portion, then easy maintenance is achieved, but the structure becomes more complex
Solution Approach 1:
The coating liquid collector is segmented from the main cup structure and fixed to the cylindrical wall portion at a specific location. This segmentation allows the collector to be independently accessed and maintained, simplifying repair operations. The fixed position on the cylindrical wall portion creates a modular arrangement where the collector can be serviced without disassembling the entire cup structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively prevents exhaust path clogging, facilitates easy maintenance, and improves productivity by ensuring efficient solvent flow and discharge, thus maintaining the apparatus's operational efficiency.
Implementation Method 1
a cylindrical mesh ring acting as a coating liquid collector, fixed to a cylindrical wall portion, which collects and dilutes the resist liquid with a solvent, preventing clogging by ensuring the solvent flows through the mesh ring's openings
Data Source
AI summary
A liquid processing apparatus that applies a coating liquid onto a substrate, includes: a substrate holder that holds and rotates the substrate; a coating liquid supplier that applies the coating liquid to the substrate; a cup provided to surround the substrate; and a solvent supplier that supplies a solvent for the coating liquid to a coating liquid collector. The cup includes: an outer cup arranged outside the substrate holder; an inner cup arranged on an inner peripheral side of the outer cup below the substrate holder and having a downwardly-extending wall; an exhaust path provided between the outer and inner cups; a cylindrical wall portion provided below the inner cup and having an upwardly-opened exhaust port communicating with the exhaust path; and the coating liquid collector arranged below the wall of the inner cup with a gap between the coating liquid collector and a lower end of the wall.