Mesh Shielding Filter for Optical Emission Spectrometer
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Solution Overview
Problem
Optical signal intensity reduction in plasma processing due to contamination by charging particles and harmful electromagnetic waves, which affects the sensitivity of optical emission spectrometers and mass spectrometers, leading to measurement errors and instrument malfunctions.
Innovation Solution
A device with a shielding filter having a mesh structure that blocks RF electromagnetic waves and collects charging particles, installed in front of the optical window of spectrometers, combined with a fixation frame and optional insertion ring for secure assembly, and electrode plates for further particle collection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the optical emission spectrometer measures the plasma field directly without shielding, then the measurement sensitivity is high, but the optical window becomes contaminated by charging particles causing intensity reduction of the optical signal
Solution Approach 1:
The patent introduces a shielding filter as an intermediary component installed between the plasma field and the optical window. This filter has a mesh structure that allows optical signals to pass through while blocking charging particles, thus protecting the optical window from contamination without significantly affecting the optical signal transmission.
Solution Approach 2:
The shielding filter is designed with a mesh structure having specific opening ratios and wire diameters optimized for the wavelength range of the plasma emission spectrum. The mesh structure provides selective permeability - allowing optical waves to pass while blocking charged particles, thus achieving local quality optimization for different types of radiation.
2Productivity
If the optical emission spectrometer is exposed to RF electromagnetic waves from the plasma generation process, then the plasma measurement can be performed, but harmful electromagnetic waves cause malfunction of communication equipment
Solution Approach 1:
The shielding filter serves as an electromagnetic shield, acting as an intermediary that blocks RF electromagnetic waves from reaching the optical emission spectrometer and surrounding communication equipment, while still allowing the plasma emission spectrum to be measured through its mesh structure.
Solution Approach 2:
The shielding filter performs multiple functions simultaneously: it blocks charging particles from contaminating the optical window, filters RF electromagnetic waves to prevent interference with communication equipment, and maintains optical signal transmission for plasma measurement. This multi-functionality resolves multiple technical contradictions at once.
3Measurement precision
If a mesh structure shielding filter is installed to block RF electromagnetic waves and collect charging particles, then the optical signal intensity is maintained, but the device complexity increases
Solution Approach 1:
The shielding filter is designed as a simple mesh structure that can be easily manufactured and replaced. Rather than using complex active systems for particle removal, a passive mesh filter provides effective protection at low cost and simple structure, accepting that the filter may need periodic replacement as it collects particles.
Solution Approach 2:
The mesh structure of the shielding filter utilizes porous material principles, with openings sized to block charged particles while allowing optical waves to pass through. This approach achieves effective shielding and particle collection without requiring complex solid structures, maintaining simplicity while resolving the technical contradiction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents intensity reduction of optical signals, reduces contamination, and prevents instrument malfunctions by effectively blocking electromagnetic interference and collecting charging particles, thereby enhancing measurement accuracy and instrument performance.
Implementation Method 1
a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field
Implementation Method 2
collects charging particles passing through the mesh
Data Source
AI summary
A device for a device for preventing the intensity reduction of an optical signal, an optical emission spectrometer, an optical instrument, and a mass spectrometer including the same are provided. The device for preventing the intensity reduction includes a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field for a wafer processing, is installed in the front of an optical window of an optical emission spectrometer for measuring the plasma field from an emission spectrum image of the plasma field, and collects charging particles passing through the mesh.