Meta-Atom Grating Couplers for Broad-Bandwidth Optical Coupling

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

The efficiency of optical coupling in optical signaling and processing systems, particularly in optical fiber applications, has not been fully optimized, necessitating improvements in taper designs to enhance signal transmission.

Innovation Solution

The use of meta-atom materials in grating couplers to redirect optical signals and overcome wavelength-restriction shortcomings, combined with a manufacturing process that includes deposition and patterning techniques to form optical components on a silicon-on-insulator substrate, allowing for high input/output density and broad bandwidth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional taper designs are used for optical coupling, then manufacturing simplicity is maintained, but optical coupling efficiency is not fully optimized

Engineering Contradiction:

Improveoptical coupling efficiencyVSAvoidtaper design complexity

Core Design Contradiction:

Loss of energyVSDevice complexity

Solution Approach 1:

The optical device is segmented into distinct functional layers including a waveguide layer, cladding layers, and a meta-atom layer. This segmentation allows each layer to be optimized independently for its specific function while maintaining overall coupling efficiency.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent employs parameter changes by varying the geometric properties of meta-atoms (size, shape, spacing) and layer thicknesses to optimize optical coupling efficiency across different wavelengths, moving beyond conventional fixed-taper designs.

Inventive Principle:

Principle #35Parameter changes

2Adaptability or versatility

If meta-atom materials are used in grating couplers to overcome wavelength restrictions, then adaptability across wavelengths is improved, but device complexity increases

Engineering Contradiction:

Improvewavelength rangeVSAvoidgrating coupler structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent uses composite material structures combining dielectric materials with meta-atom patterns to create grating couplers that operate across broad wavelength ranges. The composite nature of meta-atom layers with varying refractive indices enables multi-wavelength adaptability.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The patent transitions from conventional two-dimensional grating patterns to three-dimensional meta-atom structures with vertical layering. This dimensional enhancement allows for additional degrees of freedom in controlling optical properties across different wavelengths.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Area of moving object

If high input/output density is achieved with compact size, then space utilization is improved, but manufacturing precision requirements increase

Engineering Contradiction:

Improvedevice footprintVSAvoidpattern alignment

Core Design Contradiction:

Area of moving objectVSManufacturing precision

Solution Approach 1:

The patent incorporates preliminary alignment features such as alignment marks and registration structures during the fabrication process. These pre-established reference features enable precise positioning of meta-atom layers relative to waveguides before final bonding, reducing the impact of manufacturing tolerances.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent employs nested layer structures where meta-atom patterns are integrated within multi-layer cladding structures. This nesting approach allows compact integration of multiple functional elements in a vertically stacked configuration, maximizing space utilization while maintaining manufacturability.

Inventive Principle:

Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves high input/output density and broad bandwidth with compact size, enabling efficient optical signal transmission and reception across various wavelengths, suitable for diverse applications.

Implementation Method 1

depositing a meta-atom material over the waveguide; and patterning the meta-atom material into a grating coupler

Methodology Applied

Scientific EffectDiffraction: Diffraction

Implementation Method 2

The use of meta-atom materials in grating couplers to redirect optical signals

Methodology Applied

Scientific EffectInterference: Interference

Data Source

PatentUS20260003128A1Optical devices and methods of manufacture

Publication Date: 2026.01.01 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A method of forming an optical device as well as the optical device itself are described herein in which a waveguide is formed over a substrate and a meta-atom material is deposited over the waveguide. Once deposited, the metal-atom material is patterned to form a grating coupler over the waveguide.