Meta Device Bottom Gate Structure for Beam Steering

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Solution Overview

Problem

Existing meta devices for beam steering face challenges in efficiently controlling phase shifts of reflected light due to complex processing requirements and limited flexibility in steering direction, particularly with top gate structures which require separate electrodes and suffer from reduced yield rates and performance.

Innovation Solution

A meta device with a bottom gate structure comprising a meta material, electrodes, an insulating layer, and an active layer, where the active layer's charge density varies with applied electric signals, allowing independent voltage control of electrodes to steer reflected light to a predetermined point, enhancing processing simplicity and steering flexibility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a top gate structure is used in meta devices for beam steering, then light phase shift control is achieved, but processing complexity increases and manufacturing yield decreases

Engineering Contradiction:
Improvelight phase shift controlVSAvoidprocessing complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent inverts the conventional top gate structure to a bottom gate structure, where the gate electrode is positioned beneath the active layer instead of above it. This inversion simplifies the fabrication process by eliminating the need for complex top-layer electrode integration while maintaining the electro-optic modulation functionality for light phase shift control.

Inventive Principle:
Principle #13The other way round (Inversion)

2Adaptability or versatility

If a top gate structure is used in meta devices, then beam steering functionality is achieved, but manufacturing yield rate is reduced

Engineering Contradiction:
Improvebeam steering functionalityVSAvoidmanufacturing yield rate
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

By inverting the gate structure to bottom gate configuration, the fabrication process becomes more compatible with standard semiconductor manufacturing techniques, improving manufacturing yield while preserving the beam steering capability through the active layer's electro-optic response.

Inventive Principle:
Principle #13The other way round (Inversion)

3Ease of operation

If electrodes are spaced apart in meta devices, then independent voltage control is achieved, but device structure becomes more complex

Engineering Contradiction:
Improveindependent voltage controlVSAvoiddevice structure
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The device employs segmented electrodes that are spatially separated and electrically isolated, allowing independent voltage application to different electrode regions. This segmentation enables precise local control of the active layer's charge density and corresponding light phase shift in different spatial zones, achieving beam steering flexibility.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The meta device effectively steers light to a desired point with improved processing efficiency and performance by using a bottom gate structure, allowing for precise control of phase shifts and beam direction, overcoming limitations of top gate structures.

Implementation Method 1

an active layer that is disposed between the insulating layer and the meta material and has a charge density which varies according to an electric signal applied thereto

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 2

a meta material including a plurality of meta structures spaced apart from each other... configured to reflect at least a portion of incident light

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentEP3179297B1Meta device
Publication Date: 2020.04.01 SAMSUNG ELECTRONICS CO LTD
  • EP3179297B1 patent drawingFigure 1
  • EP3179297B1 patent drawingFigure 2
  • EP3179297B1 patent drawingFigure 3

AI summary

A meta device includes a plurality of meta structures that spaced apart from each other and reflect at least a portion of incident light, a plurality of electrodes that are spaced apart from each other, and a controller configured to control a phase shift of reflected light using a voltage applied to the plurality of electrodes.