Meta Structure Pillars for IR Signal Quality in Solid-State Sensors

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Solution Overview

Problem

Existing solid-state image sensors have limited quantum efficiency in infrared (IR)/near infrared (NIR) due to low absorption of silicon-based materials, which affects the quality of image signals.

Innovation Solution

A light-adjusting device with regions arranged in a checkerboard pattern, featuring pillars that form meta structures, is used in conjunction with a solid-state image sensor to enhance IR/NIR signal quality and improve color performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If silicon-based materials are used for photoelectric conversion, then the device structure is simple and manufacturing is easy, but the quantum efficiency in IR/NIR region is limited due to low light absorption

Engineering Contradiction:
Improveease of manufactureVSAvoidquantum efficiency
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent introduces a three-dimensional meta structure with pillars arranged in a checkerboard pattern above the planar silicon-based photoelectric conversion elements. This vertical dimensionality addition enables enhanced light trapping and absorption in the IR/NIR region without changing the fundamental silicon-based material system, thereby maintaining ease of manufacture while improving quantum efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent modifies the optical parameters by designing pillars with specific dimensions (height, width, spacing) arranged in a checkerboard pattern. By optimizing these geometric parameters, the light absorption characteristics in the IR/NIR region are significantly improved while maintaining compatibility with standard silicon-based manufacturing processes.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If alternative materials like Ge, GaAs or InGaAs are used to enhance light absorption, then the quantum efficiency in IR/NIR is improved, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvequantum efficiencyVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent segments the light-adjusting function into a separate meta structure component (pillars in checkerboard pattern) that can be independently optimized and integrated above the existing photoelectric conversion elements. This segmentation allows the silicon-based substrate to remain simple while the added meta structure provides the enhanced IR/NIR absorption capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The meta structure with pillars acts as an intermediary layer between the incident light and the silicon-based photoelectric conversion elements. This intermediary structure enhances light absorption in the IR/NIR region without requiring replacement of the underlying silicon material, thereby avoiding the complexity associated with alternative materials like Ge, GaAs, or InGaAs.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If conventional light harvesting methods are used, then the manufacturing process remains simple, but the light utilization efficiency is insufficient

Engineering Contradiction:
Improveease of manufactureVSAvoidlight utilization efficiency
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent transitions from conventional planar light harvesting to a three-dimensional meta structure with vertically extending pillars arranged in a checkerboard pattern. This dimensional enhancement significantly improves light trapping and utilization efficiency in the IR/NIR region while remaining compatible with standard manufacturing techniques.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent creates a composite light-adjusting system combining the silicon-based photoelectric conversion substrate with an overlying meta structure of pillars. This composite configuration enhances light utilization efficiency by providing multiple light-trapping interfaces and pathways while maintaining manufacturing simplicity through integration with existing silicon-based fabrication processes.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The light-adjusting device effectively enhances IR/NIR signal quality and improves color performance, leading to better image signal quality from the photoelectric conversion elements of the solid-state image sensors.

Implementation Method 1

the quantum efficiency in infrared (IR)/near infrared (NIR) are usually limited due to low absorption of silicon-based material

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 2

signal electric charges may be generated according to the amount of light received in the light sensing portion

Methodology Applied
Scientific EffectPhotoelectric conversion: Photoelectric Effect

Data Source

PatentUS12309510B2Light-adjusting device and solid-state image sensor using the same
Publication Date: 2025.05.20 VISERA TECH CO LTD
  • US12309510B2 patent drawing
  • US12309510B2 patent drawing
  • US12309510B2 patent drawing

AI summary

A light-adjusting device having first regions and second regions is provided. The light-adjusting device includes pillars that form several groups of meta structures. The groups of meta structures correspond to the first regions, and from a top view, the first regions and the second regions are arranged in a checkerboard pattern.