Spatial Light Modulator Thermal Isolation Between Meta-Pixels

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Solution Overview

Problem

Spatial light modulators using active meta-devices experience thermal cross-talk and heat interference between adjacent driving pixels, which affect the efficiency and accuracy of light emission.

Innovation Solution

The spatial light modulator includes a substrate, a distributed Bragg reflector (DBR) layer, a cavity layer, and a pixel layer with heat blocking members between pixels, where the DBR and cavity layers are divided to correspond to individual pixels, and a trench is formed to minimize heat transfer, using materials with varying thermal conductivities to block heat transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If the DBR layer and cavity layer are divided to correspond to individual pixels, then thermal cross-talk between adjacent pixels is reduced, but the device complexity increases due to additional heat blocking members and trenches

Engineering Contradiction:
Improvethermal cross-talkVSAvoiddevice complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The DBR layer and cavity layer are divided into separate regions corresponding to individual pixels, with heat blocking members and trenches introduced between adjacent pixels. This segmentation isolates the thermal fields of neighboring pixels, preventing heat generated in one pixel from transferring to adjacent pixels, thereby reducing thermal cross-talk while maintaining the reflective and resonant optical functions of each layer.

Inventive Principle:
Principle #1Segmentation

2Object-affected harmful factors

If heat blocking members are introduced between pixels, then heat interference between adjacent pixels is reduced, but the manufacturing precision requirements increase due to precise positioning needs

Engineering Contradiction:
Improveheat interferenceVSAvoidmanufacturing precision
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

Heat blocking members with specific geometric configurations (such as trenches or low-thermal-conductivity material structures) are selectively positioned between adjacent pixels at locations where thermal isolation is most critical. The heat blocking members are designed with optimized dimensions and material properties to achieve effective thermal isolation while being integrated into the existing layer structure, thereby reducing heat interference without excessively increasing manufacturing precision requirements.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces thermal cross-talk and heat interference, enhancing the accuracy and efficiency of light emission by maintaining distinct temperature differences between driving and non-driving pixels, thereby improving optical scan output and focus.

Implementation Method 1

a distributed Bragg reflector (DBR) layer provided on a surface of the substrate

Methodology Applied
Scientific EffectBragg reflection: Bragg Diffraction

Implementation Method 2

Both the HCG and DBR have a high reflectivity with respect to incident light

Methodology Applied
Scientific EffectOptical interference: Interference

Implementation Method 3

a heat blocking member provided between the plurality of pixels and configured to block heat transfer between the plurality of pixels

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 4

vertical incident light may be amplified in the cavity and vertically emitted

Methodology Applied
Scientific EffectOptical resonance: Resonance

Data Source

PatentUS12541133B2Spatial light modulators, methods of driving and manufacturing the same, and apparatuses including the spatial light modulators
Publication Date: 2026.02.03 SAMSUNG ELECTRONICS CO LTD
  • US12541133B2 patent drawing
  • US12541133B2 patent drawing
  • US12541133B2 patent drawing

AI summary

Provided is a spatial light modulator includes a substrate; a distributed Bragg reflector (DBR) layer provided on a surface of the substrate; a cavity layer provided on the DBR layer; a pixel layer provided on the cavity layer, the pixel layer including a plurality of pixels; and a heat blocking member provided between the plurality of pixels and configured to block heat transfer between the plurality of pixels, wherein each of the plurality of pixels includes a plurality of active meta-patterns.