Metal Capturing Coating for Rapid Regeneration in Substrate Processing
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Solution Overview
Problem
Existing substrate processing devices face challenges in quickly regenerating the metal ion removal capability of filters, leading to increased downtime and inefficiency in removing metal impurities from treatment solutions.
Innovation Solution
A substrate processing device with a metal capturing group coating applied to the inner walls of the treatment solution circulation path, combined with an acid-based chemical solution supply unit that increases solution exchange efficiency and regenerates the metal ion removal capability, and a metal densitometer for controlled acid-based chemical solution supply based on metal ion concentration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter with metal capturing group is used to remove metal impurities from treatment solution, then metal ion removal capability is improved, but regeneration time increases causing device downtime
Solution Approach 1:
The patent applies preliminary action by pre-coating the inner wall of the circulation path with a metal capturing group coating before the treatment solution flows through. This allows metal ions to be continuously captured during normal operation without requiring periodic filter replacement or regeneration downtime. The coating is prepared in advance and provides ongoing metal ion removal capability.
Solution Approach 2:
The system implements self-service by using the treatment solution circulation itself to regenerate the metal capturing group. The acid-based chemical solution is supplied through the same circulation path, and the pump that circulates the treatment solution also drives the regeneration process. The system regenerates itself during normal operation without requiring separate regeneration equipment or downtime.
2Reliability
If acid-based chemical solution is supplied to regenerate metal capturing group, then metal ion removal capability is restored, but solution exchange efficiency is insufficient with conventional flow paths
Solution Approach 1:
The treatment solution circulation path serves multiple functions: it transports the treatment solution to the substrate during etching processing, collects and returns the used solution, and also serves as the regeneration path for supplying acid-based chemical solution to the metal capturing group coating. This multi-functionality eliminates the need for separate regeneration piping and improves solution exchange efficiency.
Solution Approach 2:
The patent uses hydraulic principles by utilizing the pump-driven liquid flow to achieve both treatment solution circulation and acid-based chemical solution supply. The pump creates sufficient flow velocity to ensure efficient solution exchange and effective regeneration of the metal capturing group coating, leveraging fluid dynamics to improve productivity.
3Reliability
If filter is exchanged or regenerated regularly to maintain metal ion removal capability, then metal impurity removal is ensured, but device operational time is reduced due to maintenance downtime
Solution Approach 1:
The patent achieves continuity of useful action by enabling continuous metal ion removal through the coating-based system. Unlike discrete filters that require periodic replacement, the coating remains effective continuously and is regenerated in-place during normal circulation. The acid-based chemical solution is supplied continuously or periodically through the circulation path, ensuring uninterrupted metal impurity removal and extending device operational time without maintenance downtime.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for rapid regeneration of metal ion removal capability, reducing downtime and improving the efficiency of metal ion removal from treatment solutions, thereby enhancing the operational life of the device and preventing particle flow downstream.
Implementation Method 1
a coating is applied to an inner wall of a pipe, the coating including a metal capturing group which removes a metal ion in the treatment solution
Implementation Method 2
the metal capturing group includes a material containing a chelate substituent, an ion exchange group or both of the chelate substituent and the ion exchange group
Implementation Method 3
an acid-based chemical solution supply unit which supplies an acid-based chemical solution to the pipe to which the coating has been applied, and removes the metal ion from the metal capturing group
Data Source
AI summary
An object is to quickly regenerate metal ion removal capability of a substrate processing device. To achieve the object, a substrate processing device includes a processing unit, a supply tank and a collection tank. The processing unit performs etching processing on a substrate by using a treatment solution from a first circulation path. The used treatment solution is guided to the collection tank, and circulates in a second circulation path. The second circulation path includes a first partial pipe and a second partial pipe, and a metal removal coating including metal capturing groups for removing metal ions in the treatment solution is applied to an inner wall of the first partial pipe. An acid-based chemical solution is supplied to the first partial pipe from the acid-based chemical solution supply unit, so that metal adsorption force of the metal capturing groups is regenerated.