Metal-Ceramic Substrate Laser Ablation Without Metal Deposits

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Solution Overview

Problem

Laser cutting of metal-ceramic substrates often results in undesirable metal deposits near the cutting line, leading to reduced electrical insulation and mechanical instability, particularly in DCB substrates used for power electronics, which can cause delamination and crack formation.

Innovation Solution

A method using a p-sec laser with specific power and processing speed conditions to minimize metal particle deposition during laser ablation, ensuring stable insulation and mechanical stability by maintaining a flush edge and avoiding the formation of solid metal particles near the ablation edge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional laser cutting is used on metal-ceramic substrates, then material separation is achieved, but metal deposits form near the cutting line reducing electrical insulation

Engineering Contradiction:
Improvecutting precisionVSAvoidmetal deposit formation
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies parameter changes by optimizing laser power, pulse duration, and scanning speed to prevent metal particle deposition. Specifically, using pulsed laser radiation with controlled energy density and temporal parameters prevents the formation of solid metal particles that would otherwise deposit on the substrate surface near the ablation zone.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs periodic action through pulsed laser radiation instead of continuous laser beam. The pulsed regime allows controlled ablation of metal layers and ceramic substrates while preventing excessive heat accumulation and metal particle formation between pulses, thereby eliminating deposit formation.

Inventive Principle:
Principle #19Periodic action

2Ease of manufacture

If metal coating is etched away before laser ablation, then recesses can be formed, but the process requires two steps increasing complexity

Engineering Contradiction:
Improveprocess simplicityVSAvoidnumber of process steps
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent merges the metal layer removal and ceramic substrate ablation into a single laser processing step. By optimizing laser parameters, the method enables direct ablation of both metal coating and ceramic substrate simultaneously, eliminating the need for separate etching and ablation steps.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent extracts the metal layer removal step from the conventional two-step process. Instead of requiring preliminary etching, the optimized laser parameters enable direct ablation of the metal coating along with the ceramic substrate, taking out the intermediate etching operation entirely.

Inventive Principle:
Principle #2Taking out (Extraction)

3Manufacturing precision

If metal edge is set back relative to ceramic edge, then recesses are formed, but mechanical stability decreases leading to delamination

Engineering Contradiction:
Improverecess formationVSAvoidmechanical stability
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The patent uses parameter changes in laser processing to achieve flush edges between metal and ceramic. By controlling laser power, pulse duration, and scanning speed, the method removes metal and ceramic at comparable rates, producing edges that are substantially flush with each other rather than setback, thereby maintaining mechanical stability.

Inventive Principle:
Principle #35Parameter changes

4Productivity

If laser power is increased to improve processing speed, then productivity increases, but metal particle formation increases

Engineering Contradiction:
Improveprocessing speedVSAvoidmetal particle emissions
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent employs periodic pulsed laser action to decouple processing speed from particle formation. By using high-frequency pulses with controlled duration and energy, the system achieves high productivity through rapid sequential ablation while preventing the continuous heat input that would cause excessive metal particle generation.

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent applies parameter changes by optimizing the relationship between pulse duration, frequency, and energy density. This allows high processing speeds through efficient material removal while maintaining energy levels below the threshold for excessive particle generation and deposition.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method achieves stable electrical insulation and mechanical stability in metal-ceramic substrates, preventing delamination and crack formation, while also reducing the economic burden of a two-step process by allowing simultaneous laser ablation of metal and ceramic substrates.

Implementation Method 1

laser ablation of a metal-ceramic substrate

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

laser radiation through material ablation

Methodology Applied
Scientific EffectLaser heating: Heating

Implementation Method 3

separation of solids by means of continuous or pulsed laser radiation through material ablation

Methodology Applied
Scientific EffectPhase change: Phase Change

Data Source

PatentEP3615259B1Method of laser ablation of a metal-ceramic substrate
Publication Date: 2022.10.26 HERAEUS DEUTSCHLAND GMBH & CO KG
  • EP3615259B1 patent drawingFigure 1
  • EP3615259B1 patent drawing
  • EP3615259B1 patent drawing

AI summary

The present application relates to a method of laser ablation of a metal-ceramic substrate, in which a laser is used under process conditions in which the formation of solid metal particles on the metal-ceramic substrate, which can separate from metal particles released by laser ablation near the ablation edge, is essentially avoided. Further the present application relates to a ceramic-metal substrate comprising a ceramic substrate and a metallization on at least one side of the ceramic substrate, wherein the ceramic substrate and the metallization have flush cutting edge.