Metal-Ceramic Substrate Silver Contact Patterning Without Masking

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Solution Overview

Problem

Existing methods for producing metal-ceramic substrates with a structuring and silver-containing contact area are technically demanding and prone to defects due to the masking and removal processes involved.

Innovation Solution

A method for producing a metal-ceramic substrate involving structuring a metal layer, depositing a silver-containing layer, and selectively removing it without the need for masking, using techniques like etching and ultrashort pulse laser ablation to create a silver contact area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If masking and removal processes are used to create silver contact areas, then silver-containing contact areas can be formed, but the production process becomes technically demanding and defect-prone

Engineering Contradiction:
Improvecontact area formationVSAvoidproduction process
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the masking step from the production process. Instead of applying a mask to protect areas, the invention directly deposits silver only in the desired contact area patterns through selective deposition techniques, thereby removing the source of defects associated with mask application and removal while simplifying the overall process

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent performs preliminary structuring of the metal layer before silver deposition. By pre-structuring the metal layer with the desired contact area patterns, the subsequent silver deposition can be selectively applied only to these pre-defined areas, eliminating the need for masking and reducing process complexity

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If masking processes are used to create structured contact areas, then silver contact areas can be formed, but defects frequently occur in the finished substrate

Engineering Contradiction:
Improvecontact area structureVSAvoidsubstrate quality
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The invention removes the masking process entirely from the production flow. By using selective deposition methods that deposit silver only in predetermined contact areas without requiring masks, the patent eliminates the defect sources associated with mask application, pattern transfer, and mask removal, thereby improving substrate reliability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs self-aligned deposition techniques where the silver is deposited selectively based on the pre-structured metal layer geometry or through localized deposition conditions. This self-service approach eliminates the need for external masking and ensures precise contact area formation without introducing mask-related defects

Inventive Principle:
Principle #25Self-service

3Manufacturing precision

If chemical masking agents are used in the production process, then contact areas can be defined, but environmental contamination occurs

Engineering Contradiction:
Improvearea definitionVSAvoidenvironmental contamination
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and eliminates chemical masking agents from the production process. By replacing mask-based methods with selective deposition techniques that use physical or controlled chemical processes directly on the substrate, the invention removes the source of environmental contamination while maintaining precise area definition capability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces chemical masking processes with physical or controlled deposition methods. By using techniques such as selective sputtering, evaporation, or localized chemical vapor deposition that rely on physical field control rather than chemical masks, the invention eliminates harmful chemical agents while achieving precise contact area definition

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method simplifies the production process, reduces defects, and avoids environmental contamination from chemical masking agents, resulting in a reliable silver contact area for semiconductor attachment.

Implementation Method 1

b) structuring the metal layer

Methodology Applied
Scientific EffectEtching:

Implementation Method 2

c) depositing a silver-containing layer on the structured metal layer

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Implementation Method 3

The contact area is formed by ablation of the silver-containing layer in sections by a pulsed laser beam of an ultrashort pulse laser

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentEP4663620A1Method for producing a metal-ceramic substrate and metal-ceramic substrate
Publication Date: 2025.12.17 HERAEUS ELECTRONICS GMBH & CO KG
  • EP4663620A1 patent drawing
  • EP4663620A1 patent drawing

AI summary

The invention relates to a method for producing a metal-ceramic substrate having a structure and a contact area containing silver, and to a metal-ceramic substrate. The method comprises the steps: a) providing a metal-ceramic substrate comprising a1) a ceramic body and a2) a metal layer bonded to the ceramic body over a surface area, b) structuring the metal layer, c) depositing a silver-containing layer onto the structured metal layer, and d) selectively removing the silver-containing layer.