Metal Channel Layer Direct Liquid Cooling for Integrated Circuits

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Solution Overview

Problem

Traditional thermal management approaches for silicon chips with advanced integrated circuits are limited in cooling capability due to reliance on interface contact for heat dissipation, necessitating more effective heat dissipation methods.

Innovation Solution

A device and method for direct liquid cooling using a metal channel layer with channels on top of a packaged assembly, incorporating a pump for fluid circulation, and a top seal with inlets and outlets for efficient heat dissipation, which includes a stiffener member and epoxy for structural support and planarization, utilizing materials like copper or silver for enhanced thermal conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If traditional high thermal conductive materials are used for heat dissipation, then the interface contact method provides basic cooling, but the cooling capability is limited and heat dissipation speed is insufficient

Engineering Contradiction:
Improveheat dissipation capabilityVSAvoidheat dissipation speed
Core Design Contradiction:
TemperatureVSProductivity

Solution Approach 1:

The patent applies liquid cooling by circulating coolant through channels formed in the substrate to directly remove heat from the integrated circuit. The fluid flow through the channel structures enables efficient heat transport away from the heat-generating components, resolving the limitation of traditional solid-to-solid thermal contact methods.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The patent utilizes the substrate itself as a channel structure with formed pathways that allow coolant flow. The substrate is configured with internal channels that provide direct thermal contact between the coolant and the integrated circuit, enabling the substrate to function as both structural support and thermal management component.

Inventive Principle:
Principle #31Porous materials

2Productivity

If liquid cooling techniques are implemented, then heat dissipation speed is promoted, but the device structure becomes more complex

Engineering Contradiction:
Improveheat dissipation speedVSAvoiddevice structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent merges the substrate's structural function with thermal management by forming cooling channels directly within the substrate material. This integration eliminates the need for separate cooling components and reduces overall device complexity while maintaining high heat dissipation performance.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The substrate serves multiple functions: providing mechanical support for the integrated circuit, establishing electrical connections, and acting as a thermal management system through its internal coolant channels. This multi-functionality reduces the number of discrete components needed in the device.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Temperature

If channels are formed in the substrate for coolant flow, then direct liquid cooling is achieved, but the manufacturing process becomes more difficult

Engineering Contradiction:
Improvecooling efficiencyVSAvoidmanufacturing process
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The cooling channels are formed in the substrate during the substrate fabrication process itself, before the integrated circuit is mounted. This preliminary formation of channels using standard semiconductor manufacturing techniques (such as etching and deposition) integrates thermal management into the base manufacturing flow without requiring additional complex post-processing steps.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides enhanced heat dissipation by combining direct physical contact with a cooling liquid, effectively reducing the temperature of the packaged assembly by a significant margin, while being compatible with existing manufacturing processes and equipment.

Implementation Method 1

direct physical contact with a cooling liquid, effectively reducing the temperature of the packaged assembly

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

incorporating a pump for fluid circulation

Methodology Applied
Scientific EffectPumping: Pump

Implementation Method 3

utilizing materials like copper or silver for enhanced thermal conductivity

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP3815136B1Device and method for direct liquid cooling via metal channels
Publication Date: 2023.07.19 GOOGLE LLC
  • EP3815136B1 patent drawingFigure 1A
  • EP3815136B1 patent drawingFigure 1B
  • EP3815136B1 patent drawingFigure 1C

AI summary

A device for direct liquid cooling is disclosed. The device includes a packaged assembly disposed on a substrate. The device also includes a metal channel layer having a plurality of channels disposed on top of the packaged assembly, and a top seal disposed on the metal channel layer. The top seal has at least one inlet and at least one outlet for direct liquid cooling. The metal channel layer includes copper or silver. The packaged assembly can also include silicon channels. In addition, the method of producing the device is also disclosed.