Metal-Coated Elastomer Seals for UV and Plasma Resistance
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Solution Overview
Problem
Semiconductor processing chambers face contamination issues due to the damage of sealing articles by UV radiation, leading to particle contaminations on semiconductor substrates, which existing fluorine-containing elastomers fail to adequately resist.
Innovation Solution
A sealing article comprising a polymeric elastomer body with a metal or ceramic coating layer, specifically a perfluoroelastomer or fluoroelastomer, that provides excellent resistance to UV and plasma, along with high temperature resistance, chemical resistance, and high purity, preventing contamination and maintaining sealing integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If resilient sealing rings made of polymer material are used to seal processing chambers, then sealing integrity is maintained, but UV radiation damage causes particle contamination
Solution Approach 1:
The patent applies composite materials by combining a polymeric elastomer base material with a metal or ceramic coating layer. The polymeric elastomer provides sealing integrity and flexibility, while the metal or ceramic coating layer provides resistance to UV radiation and plasma. This composite structure resolves the contradiction by integrating the advantages of both materials to simultaneously achieve reliable sealing and UV radiation resistance.
2Reliability
If sealing articles are exposed to harsh environments including UV and plasma, then sealing function is maintained, but service life is reduced due to material degradation
Solution Approach 1:
The patent applies composite materials where the metal or ceramic coating layer protects the polymeric elastomer base from degradation by UV radiation and plasma exposure. This protective coating extends the service life of the sealing article while maintaining its sealing function in harsh environments.
Solution Approach 2:
The metal or ceramic coating layer serves as a protective barrier applied beforehand to shield the polymeric elastomer from harmful UV radiation and plasma. This prior protection prevents material degradation before it can occur, thereby extending service life while maintaining sealing function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sealing article effectively resists UV and plasma exposure, maintains flexibility, and extends service life without causing chemical or particulate contamination, ensuring high purity and reliable sealing in harsh semiconductor processing environments.
Implementation Method 1
The coating layer comprises at least one metal or a metal-containing material... provides excellent resistance to UV and plasma
Implementation Method 2
Resilient sealing rings made of a polymer material are used for adequately sealing a processing chamber... maintain the processing chamber in vacuum or under a pressure
Data Source
AI summary
A method of making a sealing article that includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.