Metal Foam Stop for EUV Lithography Shock Absorption
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Solution Overview
Problem
EUV lithography systems face damage from shock loads due to kinetic energy not being absorbed by hard mechanical stops, leading to collisions and mechanical deformations or damage to optical components.
Innovation Solution
Incorporating a metal foam stop that absorbs kinetic energy by plastic deformation, allowing for energy dissipation while maintaining structural stiffness and precision, and being detachably connected to the optical arrangement for easy replacement after deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If hard mechanical stops are used to limit the movement of the second component, then the movement is effectively limited, but the kinetic energy is not absorbed and high energetic impulses are introduced into the optical arrangement
Solution Approach 1:
The patent applies beforehand cushioning by incorporating a foam material layer between the second component and the stop face. This foam layer is pre-positioned to absorb kinetic energy during shock loads before the second component collides with the hard stop, thereby cushioning the impact and preventing damage to optical components.
Solution Approach 2:
The patent utilizes porous materials by employing a foam material with cellular structure. The porous nature of the foam allows it to compress and expand, effectively absorbing kinetic energy through cell collapse and rebound mechanisms, converting the harmful kinetic energy into deformation energy of the foam structure.
2Ease of repair
If the stop is made detachably connected to the first component, then the stop can be easily replaced after deformation, but the structural complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the stop into separable components with detachable connections to the first component. This allows the stop or foam layer to be independently replaced after deformation without disassembling the entire optical arrangement, facilitating maintenance while using simple connection mechanisms.
3Loss of energy
If metal foam is used to absorb kinetic energy, then energy dissipation is achieved, but the stop requires replacement after plastic deformation
Solution Approach 1:
The patent applies the disposable principle by designing the foam layer as a sacrificial element that absorbs kinetic energy through plastic deformation and can be economically replaced. The detachable connection allows the foam to be replaced as a low-cost component, making the system affordable despite the foam's limited service life after shock absorption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The metal foam stop effectively absorbs kinetic energy during shock loads, preventing damage to optical components and allowing for the optical arrangement to be repaired and reused without further damage, thus maintaining system integrity.
Implementation Method 1
a metal foam stop that absorbs kinetic energy by plastic deformation, allowing for energy dissipation while maintaining structural stiffness
Data Source
AI summary
An optical arrangement, in particular to a lithography system, includes: a first component, in particular a carrying frame; a second component which is movable relative to the first component, in particular a mirror or a housing; and at least one stop having at least one stop face for limiting the movement of the second component in relation to the first component. The stop includes a metal foam for absorbing the kinetic energy of the second component when it strikes against the stop face. A method for repairing an optical arrangement of this kind after a shock load includes replacing at least one stop, in which the metal foam was compressed under the shock load, with a stop in which the metal foam is not compressed.