Metal Lid Support Structure to Prevent Acoustic Device Deflection
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Solution Overview
Problem
The deflection of a metallic lid in electronic devices, such as acoustic wave devices, under pressure can lead to contact with functional elements, resulting in deterioration of device characteristics due to the malleability of metal lids.
Innovation Solution
Incorporating a columnar body between the support substrate and the lid in the device, which reduces the deflection of the lid when pressure is applied, thereby preventing contact with the functional elements and maintaining device performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a metallic lid is provided over the space to seal the functional element, then the sealing performance is improved, but the lid deflects when pressure is applied causing contact with functional elements
Solution Approach 1:
A support structure is introduced as an intermediary element between the metallic lid and the functional element. This support structure receives and distributes the pressure applied to the lid, preventing direct transmission of force that would cause deflection and contact with the functional element, while maintaining the sealing function of the lid.
Solution Approach 2:
The support structure is positioned in advance between the lid and functional element to cushion against potential deflection. This pre-positioned support prevents the lid from deflecting into contact with the functional element when pressure is applied, protecting the functional element before damage can occur.
2Strength
If the lid is made of metal to ensure durability, then the strength is improved, but the malleability causes deflection under pressure
Solution Approach 1:
The support structure serves as a mediator that intercepts pressure forces before they can cause the metallic lid to deflect. This allows the lid to maintain its metal construction for strength and sealing purposes while the support structure prevents shape instability under pressure.
3Weight of moving object
If the lid is made thin to reduce weight, then the weight is reduced, but the deflection increases under pressure
Solution Approach 1:
The support structure acts as a compensating element that makes up for the reduced rigidity of a thin lid. By providing additional structural support from below, the system can use a lighter, thinner lid while maintaining overall stability and preventing deflection under pressure.
Data Source
AI summary
An electronic device includes a support substrate, a piezoelectric layer that is provided on the support substrate, a functional element including an electrode provided on a surface of the piezoelectric layer, a metallic frame body that is provided on the support substrate so as to surround the piezoelectric layer and the functional element in a plan view, a metallic lid that is provided on the frame body so as to form a space between the lid and the support substrate, and seals the functional element into the space, and a columnar body that is provided between the support substrate and the lid in the space.