Metal Mask Structure for Stretch-Induced Wrinkle Control
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Solution Overview
Problem
Metal masks used in display panel manufacturing are prone to deformation and wrinkling, particularly when stretched, due to differences in material thickness and opening densities across their regions, which can lead to reliability issues during the patterning process.
Innovation Solution
A metal mask design featuring a metal thin film with distinct regions of varying opening densities and thicknesses, including transmission and non-transmission regions with etching portions and rib structures, to maintain structural integrity and reduce deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the metal mask is stretched to fit the substrate, then the metal mask can be applied to the display panel, but deformation and wrinkling occur due to uneven thickness and opening densities
Solution Approach 1:
The patent applies local quality by creating different opening densities in different regions of the metal mask. The first region (center) has a first opening density while the second region (periphery) has a second opening density that is different from the first. This non-uniform opening density distribution compensates for the stress distribution during stretching, allowing the mask to be applied to the substrate without causing deformation or wrinkling, thereby maintaining pattern precision while enabling applicability.
2Stability of the object's composition
If the opening density is increased to improve light emission uniformity, then the light emission uniformity is improved, but the metal mask becomes more prone to deformation and wrinkling
Solution Approach 1:
The patent implements local quality by assigning different opening densities to different regions. The center region (first region) has a higher opening density to ensure uniform light emission in the active display area, while the periphery region (second region) has a different opening density to maintain structural stability and reduce deformation. This spatial variation in opening density allows the mask to achieve both light emission uniformity and structural reliability simultaneously.
3Adaptability or versatility
If the metal mask thickness is reduced to improve flexibility, then the flexibility is improved, but the deformation and wrinkling increase
Solution Approach 1:
The patent applies local quality by creating a thickness gradient across the metal mask. The center region (first region) has a first thickness while the periphery region (second region) has a second thickness that is greater than the first. This thickness variation provides the necessary flexibility in the center for conformal contact with the substrate while the thicker periphery maintains structural rigidity to prevent deformation and wrinkling, thereby preserving pattern precision.
Data Source
AI summary
A metal mask according to some embodiments of the present disclosure may include a metal thin film having a first thickness and having a first region including a transmission region defining first openings penetrating the metal thin film, and a non-transmission region including an etching portion having a second thickness that is smaller than the first thickness, and a second region adjacent the first region, and defining second openings penetrating the metal thin film, wherein an opening density of the first region is less than an opening density of the second region, the opening density of the first region being defined as a number of the first openings per an area of the first region, and the opening density of the second region being defined as a number of the second openings per an area of the second region.