Metal Mirror Multispectral Filter Array With Reduced Angle Shift
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Solution Overview
Problem
Existing multispectral sensor devices face challenges in integrating filter arrays due to difficulties in incorporating linear variable filters or circular variable filters with semiconductor-based sensor elements, leading to reduced spectral range and accuracy, as well as high angle shift values.
Innovation Solution
The use of metal mirrors with a spacer layer structure, such as silver-based mirrors and dielectric layers, to create a multispectral filter array that improves durability, spectral range, and reduces angle shift, allowing for efficient multispectral sensing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If linear variable filters or circular variable filters are integrated with semiconductor-based sensor elements, then spectral filtering capability is achieved, but manufacturing difficulty increases and spectral range is reduced
Solution Approach 1:
The patent changes the fundamental parameters of the filter structure by using metal mirrors with controllable thickness and material composition instead of traditional LVC or CVC filters. This allows for easier integration with semiconductor sensors while maintaining or expanding spectral range through parameter optimization of the metal layer thickness and material properties
Solution Approach 2:
The patent employs composite structures combining metal mirrors (such as aluminum, silver, or gold) with dielectric layers or semiconductor substrates. This composite approach enables simplified manufacturing processes compared to traditional variable filters while achieving enhanced spectral coverage and reduced angle shift effects
2Measurement precision
If traditional filter arrays are used, then spectral filtering is achieved, but angle shift values increase reducing accuracy
Solution Approach 1:
The patent reduces angle shift by optimizing the thickness and material parameters of the metal mirror layers. By carefully controlling these parameters, the filter achieves minimal angle dependence while maintaining spectral filtering accuracy, directly improving measurement precision without increasing device complexity
3Reliability
If metal mirror-based filter array is used, then durability and spectral range are improved, but manufacturing precision requirements increase
Solution Approach 1:
The patent selects metal materials and thickness parameters that are tolerant to standard semiconductor manufacturing variations. By choosing appropriate metal layers (Al, Ag, Au) with optimized thickness ranges, the design achieves high durability and spectral performance while remaining compatible with conventional fabrication processes and tolerances
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The metal mirror-based multispectral filter array enhances durability and spectral capture accuracy by minimizing angle shift and expanding the spectral range, facilitating effective multispectral sensing without the integration difficulties of other filter types.
Implementation Method 1
a first mirror (110-1) and a second mirror (110-2) of a multispectral filter (105), wherein the first mirror (110-1) and the second mirror (110-2) each are or include a metal-based mirror
Implementation Method 2
a first dielectric spacer layer (130-1) disposed between the first mirror (110-1) and the second mirror (110-2)
Data Source
Figure 1
Figure 2
Figure 3A
AI summary
A device may include a multispectral filter array disposed on the substrate. The multispectral filter array may include a first metal mirror disposed on the substrate. The multispectral filter may include a spacer disposed on the first metal mirror. The spacer may include a set of layers. The spacer may include a second metal mirror disposed on the spacer. The second metal mirror may be aligned with two or more sensor elements of a set of sensor elements.