Semiconductor Metal Plating Stack for Low High-Frequency Loss

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Solution Overview

Problem

Conventional nickel plating layers in semiconductor devices increase conductor loss at high frequencies due to nickel's magnetic properties, hindering efficient operation.

Innovation Solution

A metal component for semiconductor devices is designed with a substrate having a conductivity, a nickel layer as the main component on its surface, and a noble metal layer on top, which reduces the volume of nickel and includes a noble metal such as palladium, platinum, or gold to minimize conductor loss and enhance high-frequency operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a nickel plating layer is formed on the metal substrate to improve solder wettability and bonding characteristics, then the bonding strength is improved, but conductor loss increases at high frequencies due to nickel's magnetic properties

Engineering Contradiction:
Improvebonding strengthVSAvoidconductor loss
Core Design Contradiction:
StrengthVSLoss of energy

Solution Approach 1:

The plating structure is segmented into multiple layers: a nickel layer for bonding function and an additional nickel-free layer on top to eliminate magnetic effects. This segmentation allows each layer to perform its specific function independently, resolving the contradiction between bonding strength and conductor loss.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the plating structure have different compositions optimized for different functions. The nickel layer provides magnetic properties for bonding, while the nickel-free upper layer provides non-magnetic properties for low-loss signal transmission. This local quality differentiation resolves the contradiction.

Inventive Principle:
Principle #3Local quality

2Reliability

If a thick nickel layer is used to ensure adequate bonding, then bonding reliability is improved, but high-frequency operation efficiency deteriorates due to increased magnetic loss

Engineering Contradiction:
Improvebonding reliabilityVSAvoidhigh-frequency operation efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The plating is segmented into a nickel layer for bonding reliability and a nickel-free layer for high-frequency efficiency. This allows the nickel layer to be sufficiently thick for bonding without the upper nickel layer contributing to magnetic loss, thus resolving the contradiction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The harmful magnetic nickel component is extracted from the upper plating region where it would cause loss, while retaining nickel only in the lower region where it provides bonding function. This extraction resolves the contradiction between reliability and efficiency.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If conventional multi-layer plating (nickel-palladium-gold) is applied to improve corrosion resistance and solder wettability, then durability is improved, but conductor loss at high frequencies increases due to the nickel layer

Engineering Contradiction:
ImprovedurabilityVSAvoidconductor loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The harmful nickel component is extracted from regions where it causes magnetic loss, while retaining nickel only where it provides bonding function. The upper layers use nickel-free materials that provide corrosion resistance and wettability without magnetic loss, resolving the contradiction.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Different layers have different material compositions optimized for their specific functions: nickel for bonding, nickel-free materials for low-loss transmission and corrosion resistance. This local quality differentiation resolves the contradiction between durability and conductor loss.

Inventive Principle:
Principle #3Local quality

Data Source

PatentEP4333052A1Metal component
Publication Date: 2024.03.06 MITSUI HIGH TEC INC
  • EP4333052A1 patent drawingFigure 1A~1B
  • EP4333052A1 patent drawingFigure 2A~2B
  • EP4333052A1 patent drawing

AI summary

Provided is a metal component used for manufacturing a semiconductor device, the metal component including: a substrate having a conductivity; a nickel layer formed on a portion of a surface of the substrate and containing nickel as a main component; and a noble metal layer formed on a surface of the nickel layer.