Automated Metal Shape Generation for IC Design Rule Correction

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Solution Overview

Problem

Current electronic design automation (EDA) tools face challenges in automating the correction of design rule violations, particularly line end-to-end spacing violations, in integrated circuit designs, especially as feature sizes shrink and design rules become more complex, requiring manual intervention that is not scalable or efficient.

Innovation Solution

An automated method is introduced to identify and correct design rule errors by determining clusters of shapes, calculating legal areas for trim shape placement, and generating required shapes to conform to complex design rules, including minimum spacing and patterning requirements, using algorithms that consider additional process design rules and neighboring shapes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If manual intervention is used to correct design rule violations, then accuracy in correcting violations can be maintained, but productivity and scalability are reduced

Engineering Contradiction:

Improveaccuracy in correcting design rule violationsVSAvoidspeed of design implementation

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The system performs self-correction of design rule violations through automated detection and generation of fixing shapes. The design rule checker automatically identifies violations and generates the necessary metal and metal etch shapes to correct spacing issues, eliminating the need for manual designer intervention while maintaining correction accuracy.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical correction processes with automated computational algorithms. The system uses computer-based detection and generation mechanisms to identify and correct design rule violations, substituting human manual operations with automated electronic processing that achieves both accuracy and scalability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If automated correction is implemented, then productivity is improved, but complexity of the correction system increases

Engineering Contradiction:

Improvespeed of design implementationVSAvoidcomplexity of correction system

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The correction system is segmented into distinct functional modules: design rule violation detection, cluster identification, legal area calculation, and shape generation. Each module handles a specific aspect of the correction process, making the overall complex system manageable through modular architecture where each component has a well-defined function.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system introduces intermediary data structures and processing steps between the raw layout and the final corrected layout. Intermediary elements include cluster data, legal area calculations, and temporary shape generation steps that facilitate the transformation from violation detection to final correction, making the complex process more systematic and controllable.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Manufacturing precision

If design rules become more complex to accommodate smaller feature sizes, then manufacturing precision is improved, but ease of operation deteriorates

Engineering Contradiction:

Improveconformity to design rulesVSAvoidease of design implementation

Core Design Contradiction:

Manufacturing precisionVSEase of operation

Solution Approach 1:

The system automatically handles the complexity of multiple design rules by performing self-detection and self-correction. The design rule checker autonomously identifies violations of minimum spacing requirements, track spacing requirements, and other complex rules, then generates appropriate fixing shapes without requiring the designer to manually navigate or interpret the complex rule set.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The system dynamically adjusts its behavior based on the specific design rules and layout characteristics. It calculates legal areas, determines cluster configurations, and generates shapes with specific dimensions and positions that conform to the complex design rules, adapting its parameters to match the requirements of each specific design scenario.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS10192021B1Generating and inserting metal and metal etch shapes in a layout to correct design rule errors

Publication Date: 2019.01.29 CADENCE DESIGN SYST INC

AI summary

Embodiments relate to physically implementing an integrated circuit design while conforming to complex design rule constraints. According to some aspects, embodiments relate to an automated method for generating shapes for correcting design rule errors such as line end-to-end spacing violations. In these and other embodiments, the automated method determines the errors post-placement and automatically generates the required shapes, taking into account additional process design rules and neighboring shapes. Some embodiments consider clusters of objects, potential legal areas between line-ends, merging of potential legal areas and generation of various shapes to produce a design rule correct layout.