Heated Exhaust Trap Structure for Metal Source Material Collection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate processing technologies face challenges in handling source materials with temperature-dependent viscosity, particularly in recovering precious metals like ruthenium and tantalum, due to difficulties in managing their viscosity changes during film formation and exhaust processes.
Innovation Solution
A substrate processing apparatus with a trap structure and heating mechanism to manage viscosity changes in metal-containing source materials, utilizing a first exhaust line, trap structure, and heating structure to collect and recover these materials efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a trap structure is provided to recover metal-containing source material, then recovery efficiency is improved, but device complexity increases
Solution Approach 1:
The exhaust pipe is divided into multiple sections (first exhaust line and second exhaust line) with the trap structure positioned at a specific location. This segmentation allows the trap to capture source material at the optimal point while maintaining a relatively simple overall structure.
Solution Approach 2:
A heating structure is introduced as an intermediary component between the trap structure and the source material. This heating structure facilitates the collection and recovery of source material by controlling its physical state, thereby improving recovery efficiency without significantly complicating the overall device.
2Ease of operation
If heating structure is added to control viscosity, then source material handling is improved, but device complexity increases
Solution Approach 1:
The heating structure controls the temperature parameter of the source material to manage its viscosity. By adjusting the temperature, the source material's flow characteristics are optimized for handling and collection, making it easier to process while adding minimal structural complexity.
3Quantity of substance
If trap structure is positioned in exhaust pipe, then source material collection is improved, but risk of re-sublimation increases
Solution Approach 1:
The heating structure is positioned locally at the trap structure location rather than throughout the entire exhaust system. This localized heating collects source material efficiently while avoiding excessive temperature rise that would cause re-sublimation, thus balancing collection quantity with reliability.
4Adaptability or versatility
If bypass pipe is provided, then process flexibility is improved, but device complexity increases
Solution Approach 1:
The bypass pipe is configured to be selectively usable, allowing the system to dynamically switch between different exhaust paths. This provides process flexibility for handling source materials with varying viscosity characteristics while adding only minimal structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables effective recovery of source materials with temperature-dependent viscosity by controlling their viscosity and preventing re-sublimation, enhancing recovery efficiency and resource conservation.
Implementation Method 1
a heating structure configured to heat the trap structure in accordance with a viscosity of the metal-containing source material
Data Source
AI summary
There is provided a technique that includes: an exhaust pipe through which a process gas containing a metal-containing source material is exhausted from a process chamber, wherein the exhaust pipe comprises a first exhaust line; a trap structure provided in the first exhaust line and configured to collect the metal-containing source material from the process gas; and a heating structure configured to heat the trap structure in accordance with a viscosity of the metal-containing source material.