Metalens Unit for Semiconductor Fault Analysis
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Solution Overview
Problem
Existing semiconductor fault analysis devices require complex preparation and have difficulty reducing the thickness of solid immersion lenses, limiting their spatial resolution and efficiency.
Innovation Solution
A metalens unit with a metalens structure that includes a base portion, first antennas, and a first intermediate portion, where the effective refractive index is adjusted by controlling the size, shape, and arrangement pitch of the antennas to achieve a desired lens function, allowing for a thinner design and improved light transmittance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional solid immersion lens is used to acquire an enlarged image with high spatial resolution, then the magnification and number of openings are enlarged, but the thickness of the lens cannot be reduced because the thickness is decided depending on the outer diameter
Solution Approach 1:
The solid immersion lens is segmented into a metalens portion with multiple antenna elements and a holding portion. The metalens portion has a thickness of 100 nm or more and 10 μm or less, which is significantly thinner than conventional solid immersion lenses while maintaining high spatial resolution through the antenna array structure.
Solution Approach 2:
The patent changes the optical parameters by using a metalens structure with antennas having specific refractive indices and arrangement patterns. The effective refractive index is controlled by adjusting the arrangement pitch and configuration of the antenna elements, enabling lens function with reduced thickness.
2Measurement precision
If fine structures are formed on the silicon substrate itself to acquire an enlarged image, then the spatial resolution is improved, but the preparation for observation becomes extremely complicated
Solution Approach 1:
The lens function is extracted from the observation target (silicon substrate) and transferred to a separate metalens structure. The metalens portion is held by the holding portion at a predetermined position, allowing the substrate to remain simple while achieving high spatial resolution through the external metalens.
Solution Approach 2:
The metalens acts as an intermediary between the light source and the observation target. The holding portion positions the metalens to overlap with the light receiving portion of the objective lens, mediating the optical path to achieve enlarged imaging without modifying the substrate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The metalens unit enables reduced thickness and improved spatial resolution, reducing labor and cost in semiconductor fault analysis while enhancing light transmittance and efficiency.
Implementation Method 1
a plurality of first antennas provided between the first surface and the base portion... an effective refractive index of a first antenna portion constituted by the plurality of first antennas and the first intermediate portion is adjusted
Data Source
AI summary
The present disclosure relates to a metalens unit including a metalens having a structure for reducing a thickness. The metalens unit includes a metalens and a holding portion for the metalens. The metalens includes a base portion and a first antenna portion. The first antenna portion is constituted by a plurality of first antennas each having a first refractive index and a first intermediate portion having a second refractive index and positioned between the plurality of first antennas. A first antenna portion is formed such that one-dimensional arrangement constituted by some of end surfaces of the plurality of first antennas includes a pattern in which at least one of a size of the end surface, a shape of the end surface, and an arrangement pitch is changed along a reference line.