Metallic Optical Mirror Substrates Thermal Mismatch

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Solution Overview

Problem

High precision metal mirrors face challenges in achieving low scatter and maintaining laser-induced damage threshold performance across a wide wavelength range due to defects in aluminum alloy substrates, and thermal mismatch issues with nickel plating, which limits their use in applications with varying temperatures.

Innovation Solution

A method involving diamond turning and polishing of metal substrates to achieve a surface roughness of less than 25Å RMS, followed by ion bombardment and low-pressure magnetron sputtering for depositing metallic layers with minimal thermal expansion mismatch, and a glycol-based colloidal polishing to achieve a smooth surface, along with a thin film stack for enhanced reflectivity and durability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If nickel plating is applied to aluminum alloy substrate, then corrosion resistance and laser damage threshold are improved, but thermal mismatch causes mirror surface bending

Engineering Contradiction:
Improvecorrosion resistanceVSAvoidmirror surface flatness
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent changes the material parameter of the plated layer from nickel to aluminum, which has the same coefficient of thermal expansion as the aluminum substrate. This eliminates the thermal mismatch parameter that causes bending, while still providing corrosion resistance and laser damage threshold improvement through the aluminum plating layer.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses aluminum plating on an aluminum substrate, creating a homogeneous material system. This eliminates the bimetallic effect between dissimilar materials (aluminum and nickel) and ensures uniform thermal expansion behavior, preventing mirror surface bending while maintaining protective functions.

Inventive Principle:
Principle #33Homogeneity

2Stability of the object's composition

If electro-deposited high purity aluminum plating is applied, then thermal mismatch is avoided, but the oxide layer damages diamond tools and the soft surface builds up on tools

Engineering Contradiction:
Improvethermal expansion matchVSAvoiddiamond tool durability
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The patent modifies the plating parameters by controlling the aluminum plating process to create a layer with appropriate hardness and reduced oxide formation. This allows the aluminum plating to match thermal expansion while being less damaging to diamond tools during machining, resolving the conflict between thermal match and manufacturability.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If polishing is performed on aluminum substrate, then surface finish is improved, but surface peak-to-valley variations remain high due to impurities

Engineering Contradiction:
Improvesurface roughnessVSAvoidscatter performance
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies aluminum plating before final polishing. This preliminary plating step creates a uniform, impurity-free surface layer that can be polished to high precision without the peak-to-valley variations caused by substrate impurities. The plating acts as a fresh, clean surface for polishing, eliminating the scatter issues associated with polishing the aluminum substrate directly.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution results in mirrors with reduced scattering, improved corrosion resistance, and enhanced laser damage threshold performance, suitable for applications across a wide wavelength range and varying temperatures, including those from -70°C to 60°C.

Implementation Method 1

depositing a coating including at least one metallic layer on the ion bombarded surface of the substrate using low pressure magnetron sputtering

Methodology Applied
Scientific EffectSputtering: Sputtering

Implementation Method 2

ion bombarding the substrate with an inert gas

Methodology Applied
Scientific EffectIon bombardment: Ion Beam

Data Source

PatentEP3132067B1Enhanced performance metallic based optical mirror substrates
Publication Date: 2020.05.06 CORNING INC
  • EP3132067B1 patent drawingFigure 1~4

AI summary

A method for coating substrates is provided. The method includes diamond turning a substrate to a surface roughness of between about 60Å and about 100Å RMS, wherein the substrate is one of a metal and a metal alloy. The method further includes polishing the diamond turned surface of the substrate to a surface roughness of between about 10Å and about 25Å to form a polished substrate, heating the polished substrate, and ion bombarding the substrate with an inert gas. The method includes depositing a coating including at least one metallic layer on the ion bombarded surface of the substrate using low pressure magnetron sputtering, and polishing the coating to form a finished surface having a surface roughness of less than about 25Å RMS using a glycol based colloidal solution.