Metallic Tape Laser Target for Consistent Shortwave Radiation
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Solution Overview
Problem
Existing systems for generating shortwave radiation using metallic tapes face issues with maintaining focus due to dimpling and debris creation, leading to inconsistent production of EUV and X-rays as the tape is advanced across the laser beam.
Innovation Solution
A novel apparatus that maintains the metallic tape in a planar configuration using a positioning mechanism with rollers to keep the tape aligned between two projecting elements, coupled with a pinch mechanism and a take-up spool system to manage tape tension and collect debris, ensuring consistent laser focus and extended usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If a metallic tape is used as a target for laser beam impingement, then the number of shots can be increased to approximately 500,000 shots, but the tape develops dimples and debris that cause the surface to become uneven
Solution Approach 1:
The invention employs a dynamic compensation mechanism where a roller applies variable pressure to the metallic tape to counteract the formation of dimples. The roller's position and pressure are adjusted in real-time to maintain the tape's surface flatness despite the progressive damage from laser shots, thereby resolving the contradiction between extended usage duration and maintaining manufacturing precision.
2Productivity
If the tape is advanced across the laser beam focal point, then continuous radiation generation is possible, but the uneven surface directs the moving tape outside of the focal plane
Solution Approach 1:
The invention implements a feedback control system where the position and condition of the metallic tape are continuously monitored during advancement. Based on this feedback, the roller's compensating pressure is dynamically adjusted to maintain the tape within the focal plane, ensuring both continuous radiation generation and precise laser focus are achieved simultaneously.
3Reliability
If the tape is held in a plane during advancement, then laser focus is maintained, but additional positioning mechanisms increase system complexity
Solution Approach 1:
The invention introduces a roller as an intermediary element between the tape advancement system and the laser focus requirement. This simple mechanical intermediary applies localized pressure to compensate for surface deformations, achieving reliable laser focus consistency without requiring complex positioning mechanisms or control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for reliable and consistent generation of shortwave radiation, such as EUV and X-rays, with the metallic tape capable of withstanding 500,000 shots without breakage or defocusing, significantly surpassing the limitations of solid targets and previous tape-based systems.
Implementation Method 1
A laser beam focuses and impinges on the first side of the tape to produce a plasma which in turn emits the desired shortwave radiation
Implementation Method 2
A laser beam focuses and impinges on the first side of the tape to produce a plasma which in turn emits the desired shortwave radiation
Implementation Method 3
the impingement of the laser beam on a tape composed of copper, phosphor-bronze, and the like, also creates dimples
Data Source
AI summary
An apparatus providing a source of shortwave electromagnetic radiation utilizing a tape having a first side and a second side and a laser beam focused and impinging on the first side of the tape. The apparatus utilizes a tape storage unit which delivers or feeds tape from the same. A base supports a first projecting element which contacts the second side of the tape emanating from the storage unit. A second projecting element supported by the base contacts the first side of the tape being fed from the tape storage unit. The portion of the tape between the first and second projecting elements constantly lies in a plane during the feeding of the tape and provides a target surface for a focused laser beam which generates shortwave radiation.