Metamaterial Edge Coupler for Silicon Nitride Waveguides

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Solution Overview

Problem

Conventional edge couplers in photonics chips suffer from significant light leakage loss due to the mismatch between the large mode size of light sources and the small dimensions of the coupler tip, particularly when coupling light from single-mode optical fibers to silicon nitride waveguides, leading to inefficiencies in mode transformation and increased electromagnetic field distribution.

Innovation Solution

A structure incorporating a metamaterial layer with elements separated by gaps filled with dielectric material is positioned between the substrate and the waveguide core, which reduces leakage loss by acting as an intermediate refractive index medium, allowing for improved mode confinement and conversion without the need for an undercut in the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the tip cross-sectional area is reduced to enable mode transformation, then mode conversion capability is improved, but light confinement capability deteriorates causing leakage loss

Engineering Contradiction:
Improvemode conversion capabilityVSAvoidlight leakage loss
Core Design Contradiction:
Adaptability or versatilityVSLoss of energy

Solution Approach 1:

The patent introduces an intermediate layer with gradually varying refractive index between the waveguide core and substrate. This intermediate layer acts as a mediator that provides continuous refractive index transition, preventing abrupt index changes that cause mode mismatch and leakage. The layer comprises multiple sub-layers with refractive indices progressively changing from the waveguide core to the substrate, thereby reducing reflection and confinement loss while maintaining mode transformation capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs parameter changes by varying the refractive index continuously across the intermediate layer thickness. Each sub-layer has a specifically designed refractive index that transitions smoothly from the high-index waveguide core to the low-index substrate. This parameter gradient allows the optical mode to adapt gradually, maintaining confinement while enabling mode size transformation at the tip.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If the tip dimensions are made small to achieve mode transformation, then spot size conversion is improved, but electromagnetic field confinement deteriorates

Engineering Contradiction:
Improvespot size conversion capabilityVSAvoidelectromagnetic field distribution
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The intermediate layer serves as an intermediary structure between the small-tip waveguide and the substrate. It provides a gradual refractive index environment that allows the electromagnetic field to transition smoothly from the confined tip region to the broader substrate region, preventing field leakage and unwanted distribution patterns.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent addresses the two-dimensional tip dimension reduction problem by introducing a third dimension - the vertical intermediate layer structure. This additional dimensional control through refractive index stratification compensates for the reduced lateral confinement, allowing small tip dimensions to maintain effective electromagnetic field confinement.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If conventional edge coupler structure is used, then fabrication is simplified, but coupling efficiency deteriorates due to mode mismatch

Engineering Contradiction:
Improvefabrication simplicityVSAvoidcoupling loss
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent modifies the conventional structure by changing the refractive index parameter distribution vertically through the intermediate layer. This parameter change approach maintains compatibility with standard fabrication processes while significantly improving coupling efficiency through better mode matching between fiber and waveguide.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure consisting of the waveguide core, intermediate layer with multiple sub-layers of different refractive indices, and substrate. This composite material approach enables optimized optical performance by combining materials with different refractive properties, improving coupling efficiency while remaining manufacturable.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The metamaterial layer effectively reduces light leakage to the substrate, enhances mode conversion, and equalizes coupling losses for both transverse electric and magnetic polarization modes, resulting in a more efficient edge coupler with reduced footprint and simplified fabrication.

Implementation Method 1

the metamaterial layer is positioned in a vertical direction between the substrate and the waveguide core... reduces leakage loss by acting as an intermediate refractive index medium

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS11803016B2Edge couplers including a metamaterial layer
Publication Date: 2023.10.31 GLOBALFOUNDRIES US INC
  • US11803016B2 patent drawing
  • US11803016B2 patent drawing
  • US11803016B2 patent drawing

AI summary

Structures for an edge coupler and methods of fabricating such structures. The structure includes a substrate, a waveguide core, and a metamaterial layer positioned in a vertical direction between the substrate and the waveguide core. The metamaterial layer includes a plurality of elements separated by a plurality of gaps and a dielectric material in the plurality of gaps.