Metastable Silicon Doping via Isotope Transmutation Alloying

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Solution Overview

Problem

Conventional semiconductor materials face limitations in dopant solubility, particularly with phosphorous in silicon, which is insoluble at room temperature and only slightly soluble at high temperatures, restricting the modification of charge carrier properties and efficiency.

Innovation Solution

Isotope transmutation alloying is used by introducing Si31 radioisotope into molten silicon, allowing it to transmute into P31 and form a metastable silicon-based semiconductor material with improved properties, enabling higher solubility and conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If phosphorous is added to silicon to dope the semiconductor material, then charge carrier properties are modified, but solubility is limited and dopant concentration cannot be increased beyond very low levels

Engineering Contradiction:
Improvedopant concentrationVSAvoidsolubility stability
Core Design Contradiction:
Quantity of substanceVSStability of the object's composition

Solution Approach 1:

The patent introduces the dopant (phosphorous) into the silicon melt before solidification occurs, during the preliminary stage of material formation. This preliminary action allows the dopant to be incorporated into the crystal lattice structure during the solidification process, achieving uniform distribution and higher concentrations than post-growth doping methods can provide.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes temperature as a critical parameter, maintaining the silicon in a molten state during dopant introduction to enhance solubility, then controlling the cooling and solidification process to trap the dopant atoms in the crystal lattice. By changing the temperature parameter from high (molten state with high solubility) to low (solid state with low equilibrium solubility), the system achieves high dopant concentration that would be impossible at equilibrium conditions.

Inventive Principle:
Principle #35Parameter changes

2Quantity of substance

If high temperature is used to increase phosphorous solubility in silicon, then dopant concentration can be increased, but the process requires very high temperatures and the dopant remains insoluble at lower temperatures

Engineering Contradiction:
Improvedopant concentrationVSAvoidprocessing temperature
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The patent exploits the phase transition of silicon from liquid to solid state. In the liquid phase, phosphorous has high solubility in silicon, allowing large amounts of dopant to be dissolved. During controlled solidification, the dopant atoms are trapped in the crystal lattice, creating a supersaturated solid solution. This phase transition approach allows achieving high dopant concentrations without requiring the maintenance of very high temperatures throughout the entire process.

Inventive Principle:
Principle #36Phase transitions

Solution Approach 2:

The dopant is introduced into the silicon melt before solidification, performing the doping action preliminarily during the high-temperature liquid phase when solubility is high. This preliminary doping action eliminates the need for subsequent high-temperature processing steps that would otherwise be required to achieve the same dopant concentration.

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If conventional doping methods are used, then the process is simple and well-established, but the maximum dopant concentration is restricted by equilibrium solubility limits

Engineering Contradiction:
Improveprocess simplicityVSAvoiddopant concentration
Core Design Contradiction:
Ease of manufactureVSQuantity of substance

Solution Approach 1:

The patent employs phase transition of silicon from liquid to solid state to achieve supersaturation of dopant in the crystal lattice. By utilizing the phase transition process, the method maintains simplicity comparable to conventional casting techniques while achieving dopant concentrations that far exceed equilibrium solubility limits, thus resolving the contradiction between process simplicity and dopant concentration capability.

Inventive Principle:
Principle #36Phase transitions

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enhances the solubility and conductivity of silicon-based semiconductors, allowing for tailored charge carrier concentrations and improved performance in devices like solar cells by forming a metastable state with P31 atoms within the silicon crystal lattice.

Implementation Method 1

introducing Si31 radioisotope into molten Si, solidifying the Si and Si31 radioisotope to form a transition material comprising atoms of the Si31 radioisotope within a Si crystal lattice structure, and P31 atoms retained in the Si crystal lattice structure

Methodology Applied
Scientific EffectIsotope transmutation: Radioactive Decay

Data Source

PatentUS10290752B1Methods of doping semiconductor materials and metastable doped semiconductor materials produced thereby
Publication Date: 2019.05.14 ST3 LLC
  • US10290752B1 patent drawing
  • US10290752B1 patent drawing
  • US10290752B1 patent drawing

AI summary

The structures of base semiconductor materials such as Si are modified by the use of isotope transmutation alloying. A radioisotope such as Si31 is added into a base semiconductor material such as Si, and the radioisotope is transformed to a transmuted form within the crystal lattice structure of the base semiconductor material. A master alloy comprising a relatively large amount of radioisotope such as Si31 may initially be made, followed by introduction of the master alloy into the base semiconductor material. When Si31 is used as the radioisotope, it may be transmuted into P31 within an Si crystal lattice structure. Metastable semiconductor materials doped with otherwise insoluble amounts of selected dopants are produced as a result of the transmutation process.