Metastructure Polymeric Protection for Optical Stability

Solution Overview

Problem

Optical devices with metastructures face mechanical instability and environmental degradation issues, which can impair their functionality and safety, particularly in applications where contaminants can damage the nanostructures and alter their refractive index.

Innovation Solution

The integration of metastructures with polymeric layers between nanostructures and a protective polymeric layer over the metastructures provides mechanical stability and protection from physical, chemical, and environmental degradation, using techniques like imprinting and atomic layer deposition to form meta-atoms, such as titanium dioxide, and applying a hydrophobic or hydrophilic protective layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If metastructures are exposed directly without protective layers, then manufacturing simplicity is maintained, but mechanical stability and resistance to environmental degradation deteriorate

Engineering Contradiction:

Improvemanufacturing simplicityVSAvoidmechanical stability

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

A polymeric protective layer is deposited over the metastructure to form a protective shell. This thin film structure provides mechanical stability and environmental protection while maintaining the nanoscale dimensions and optical properties of the underlying metastructure.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The device combines the metastructure material (e.g., titanium dioxide, silicon) with polymeric protective materials to create a composite structure. The composite integrates the optical functionality of the metastructure with the mechanical stability and environmental resistance of the polymeric layer.

Inventive Principle:

Principle #40Composite materials

2Device complexity

If metastructures are exposed directly without protective layers, then device complexity is minimized, but resistance to physical and chemical degradation deteriorates

Engineering Contradiction:

Improvestructure complexityVSAvoidresistance to environmental degradation

Core Design Contradiction:

Device complexityVSObject-affected harmful factors

Solution Approach 1:

A polymeric protective layer is deposited over the metastructure to form a protective shell. This thin film structure provides mechanical stability and environmental protection while maintaining the nanoscale dimensions and optical properties of the underlying metastructure.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The polymeric protective layer creates an inert environmental barrier that isolates the metastructure from harmful external factors such as moisture, oxygen, and contaminants. This protective barrier prevents chemical degradation and maintains the optical properties of the metastructure in adverse environments.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

3Reliability

If polymeric layers are added to protect metastructures, then mechanical stability and environmental protection are improved, but manufacturing process complexity increases

Engineering Contradiction:

Improveprotection from degradationVSAvoidmanufacturing process complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The polymeric protective layer is deposited during the metastructure fabrication process itself, before the metastructure is fully completed or tested. This preliminary protective action ensures that the metastructure is protected from the beginning, preventing degradation during subsequent manufacturing steps or device assembly.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The protective layer deposition is merged with the existing manufacturing process steps. The polymeric layer is deposited using techniques such as atomic layer deposition (ALD) or spin coating, which can be integrated into standard semiconductor fabrication workflows, thereby minimizing the increase in manufacturing complexity.

Inventive Principle:

Principle #5Merging (Combining)

4Manufacturing precision

If contaminants are present on metastructures, then optical functionality deteriorates due to altered refractive index, but protection mechanisms add manufacturing steps

Engineering Contradiction:

Improveoptical functionalityVSAvoidnumber of protective layers

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

A polymeric protective layer is deposited over the metastructure to form a protective shell. This thin film structure provides mechanical stability and environmental protection while maintaining the nanoscale dimensions and optical properties of the underlying metastructure.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The polymeric protective layer creates an inert environmental barrier that isolates the metastructure from harmful external factors such as moisture, oxygen, and contaminants. This protective barrier prevents chemical degradation and maintains the optical properties of the metastructure in adverse environments.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the mechanical stability and protection of metastructures, preventing damage from contaminants and maintaining optical functionality, thereby ensuring the safety and reliability of optical devices in adverse environments.

Implementation Method 1

forming openings in the polymeric layer, and depositing a material in the openings to form meta-atoms of a first metastructure. Adjacent ones of the meta-atoms are separated from one another by polymeric material of the polymeric layer

Methodology Applied

Scientific EffectAdhesion: Adhesive

Implementation Method 2

providing a protective polymeric layer over the first metastructure... wherein the protective layer has a hydrophobic or hydrophilic surface

Methodology Applied

Scientific EffectHydrophobic effect: Hydrophobe

Implementation Method 3

provides mechanical stability and protection from physical, chemical, and environmental degradation

Methodology Applied

Scientific EffectPhysical containment: Physical Containment

Implementation Method 4

depositing the material in the openings by atomic layer deposition

Methodology Applied

Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Implementation Method 5

forming the openings in the polymeric layer by an imprinting process. The imprinting process can include, for example, pressing a stamp into the polymeric layer

Methodology Applied

Scientific EffectMechanical deformation: Deformation

Data Source

PatentUS20230194757A1Optical devices including metastructures and methods for fabricating the optical devices

Publication Date: 2023.06.22 NIL TECH APS (DK)

AI summary

Manufacturing an optical device includes providing a substrate (102) having a polymeric layer (104) on a surface of the substrate, forming openings in the polymeric layer, and depositing a material in the openings to form meta-atoms (114, 214) of a first metastructure. Adjacent ones of the meta-atoms are separated from one another by polymeric material of the polymeric layer. Optical devices that include one or more metastructures in which meta-atoms are separated from one another by polymeric material are described, as are modules that incorporate the optical devices.