Metasurface Diffractive Optical Element for TIRF Excitation

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Solution Overview

Problem

TIRF microscopy requires high-numerical-aperture objectives that are expensive and introduce significant aberrations, and the alignment of these objectives is complex.

Innovation Solution

A diffractive optical element comprising a substrate with a metasurface made of dielectric material, which diffracts light to generate evanescent waves without the need for high-numerical-aperture objectives, using a patterned structure that redirects light into specific diffraction orders to achieve total internal reflection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If high-numerical-aperture objectives are used to generate evanescent waves for TIRF microscopy, then the excitation efficiency and spatial resolution are improved, but the cost increases significantly and alignment complexity increases

Engineering Contradiction:
Improvespatial resolutionVSAvoidalignment complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the TIRF generation function from the complex high-NA objective lens and implements it through a simplified diffractive optical element (grating) on the substrate surface. This separates the evanescent wave generation capability from the expensive, complex objective lens, allowing standard objectives to be used while maintaining TIRF functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent creates a periodic pattern (grating) on the substrate that copies the optical function of a high-NA objective lens for generating evanescent waves. This diffractive structure replicates the essential TIRF-generating capability without requiring the expensive, complex lens system, thereby simplifying alignment and reducing cost while maintaining spatial resolution.

Inventive Principle:
Principle #26Copying

2Reliability

If high-numerical-aperture objectives are used for TIRF microscopy, then evanescent wave generation is achieved, but the cost of the system increases significantly

Engineering Contradiction:
Improveevanescent wave generationVSAvoidsystem cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces the expensive, fragile high-NA objective lens with a inexpensive diffractive optical element (grating pattern) that can be directly fabricated on the substrate using standard lithography techniques. This disposable-like approach to generating evanescent waves dramatically reduces system cost while maintaining reliable TIRF functionality.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent substitutes the mechanical/optical complexity of a high-NA objective lens with a static diffractive pattern on the substrate. This replacement eliminates the need for expensive, precision-mechanized lens systems while achieving the same evanescent wave generation through diffraction physics, thereby reducing system cost and simplifying manufacturing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If high-numerical-aperture objectives are used to achieve total internal reflection, then the penetration depth control is improved, but significant optical aberrations are introduced

Engineering Contradiction:
Improvepenetration depth controlVSAvoidoptical aberrations
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a diffractive optical element (grating) as an intermediary between the light source and the sample. This intermediate structure modifies the incident light to generate evanescent waves with controlled penetration depths without requiring high-NA objectives that introduce aberrations. The grating acts as a mediator that achieves precise penetration control through diffraction geometry rather than through high-angle refraction.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-resolution TIRF microscopy with reduced background noise and cost, while simplifying alignment and eliminating the need for expensive high-NA objectives.

Implementation Method 1

said metasurface being suitable for diffracting light radiation of wavelength λ comprised in said spectral range, and incident with an angle of incidence, to form diffracted radiation

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

said diffracted radiation being formed in such a way that it propagates through the substrate, and strikes said second surface of the substrate at a diffracted angle θd larger than or equal to a limit angle θc of total internal reflection

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 3

an evanescent wave OE appears in the ambient medium MA. This evanescent wave has an intensity that decreases exponentially with distance z from the surface S: I(z)=I0e−z/δ

Methodology Applied
Scientific EffectEvanescent wave:

Implementation Method 4

The evanescent wave excites the fluorophores contained in the ambient medium, but only over a thickness of the order of δ

Methodology Applied
Scientific EffectFluorescence excitation: Fluorescence

Data Source

PatentUS12455399B2Diffractive optical element comprising a metasurface for TIRF microscopy
Publication Date: 2025.10.28 CENT NAT DE LA RECH SCI (C N R S)
  • US12455399B2 patent drawing
  • US12455399B2 patent drawing
  • US12455399B2 patent drawing

AI summary

Disclosed is a diffractive optical element includes a substrate (BS) having a first surface and a second surface opposite the first surface, being transparent to light in at least one spectral range and having, in the spectral range, a refractive index that is greater than that of water, at least one metasurface able to diffract light radiation of wavelength λ within the spectral range, incident with an angle of incidence, according to a diffracted radiation, so that the diffracted radiation propagates in the substrate and reaches the second surface of the substrate at a diffracted angle θd that is greater than or equal to a limit angle (θc) of total internal reflection between the substrate and water, the metasurface being designed to have, for the angle of incidence, a transmission with a 0 order of diffraction below 5% and a transmission of the diffracted radiation corresponding to a −1 or +1 order of diffraction above 50%.