Transmissive Metasurface Lens Integration for Ultra-Thin Light Shaping
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Solution Overview
Problem
Existing optical systems face limitations in efficiently shaping light without curvature and achieving a range of phase shifts due to the thickness and structural constraints of traditional refractive and diffractive optics, limiting their ability to impart phase shifts and angular deflections.
Innovation Solution
The integration of metasurface elements with subwavelength spacing and planar profiles, allowing for the deposition of patterned layers and etching processes to form metasurface features that impose phase shifts on light, combined with spacer layers and additional metasurface elements to create complex optical systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If traditional refractive optics are used to shape light, then light can be focused or directed, but the optical element requires thickness 10-100 times larger than the wavelength of light
Solution Approach 1:
The patent changes the fundamental operating parameter of optical elements from relying on thickness (traditional refractive optics) to relying on subwavelength surface structures (metasurfaces). The metasurface elements have thickness on the order of the wavelength of light, representing a parameter change from 10-100 wavelengths to 1 wavelength thickness, while achieving the same light-shaping function through altered geometric parameters of surface features.
Solution Approach 2:
The patent transitions from three-dimensional bulk optical elements to two-dimensional surface structures. The metasurface elements are planar with subwavelength features arranged in the plane, eliminating the need for thickness in the optical path direction. This dimensional reduction from 3D to 2D enables ultra-thin optical components while maintaining functionality.
2Adaptability or versatility
If traditional diffractive optical elements are used, then phase shifts can be introduced, but only two distinct phase shift values (0 or π) are achievable
Solution Approach 1:
The patent applies local quality by varying the geometric properties (size, shape, orientation) of individual subwavelength features across the metasurface to impart different local phase shifts. Each feature's geometry is locally optimized to provide the specific phase shift required at that position, enabling continuous phase modulation across the entire surface without requiring multiple discrete optical elements.
3Manufacturing precision
If metasurface elements with subwavelength features are used, then phase shifts and angular deflections can be controlled, but the features require precise subwavelength fabrication
Solution Approach 1:
The patent segments the optical function into discrete subwavelength features arranged in a periodic or aperiodic array. Each feature acts as an independent optical element contributing to the overall phase and amplitude modulation. This segmentation enables the use of standard lithographic techniques to fabricate the metasurface, as the periodic structure can be created using conventional manufacturing processes with appropriate pitch control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient shaping and deflection of light without curvature, achieving a range of phase shifts and angular deflections, and integrating with illumination sources and sensors to form complex optical systems with improved performance.
Implementation Method 1
metasurface elements abruptly introduce phase shifts onto light field. This enables metasurface elements to have thicknesses on the order of the wavelength of light at which they are designed to operate
Implementation Method 2
etching the hard mask layer using an anisotropic etch process to form a plurality of voids and raised features corresponding to the array pattern in the hard mask
Implementation Method 3
the array pattern is etched using a reactive ion etching process selected from the group consisting of: SF6, Cl2, BCl3, C4F8 or any static or multiplexed mixture thereof
Data Source
AI summary
Metasurface elements, integrated systems incorporating such metasurface elements with light sources and/or detectors, and methods of the manufacture and operation of such optical arrangements and integrated systems are provided. Systems and methods for integrating transmissive metasurfaces with other semiconductor devices or additional metasurface elements, and more particularly to the integration of such metasurfaces with substrates, illumination sources and sensors are also provided. The metasurface elements provided may be used to shape output light from an illumination source or collect light reflected from a scene to form two unique patterns using the polarization of light. In such embodiments, shaped-emission and collection may be combined into a single co-designed probing and sensing optical system.