Water Resistance Meter Adapter With Switchable Chemical Isolation
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Solution Overview
Problem
The manual detachment and mounting of a water resistance meter in semiconductor process devices to prevent chemical solution damage is complex, hindering efficient operation.
Innovation Solution
An adapter apparatus that connects and isolates a water resistance meter to a process tank, allowing state adjustment to facilitate detection during cleaning and protect from chemical solutions during non-cleaning states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the water resistance meter is manually detached and mounted to prevent damage from chemical solutions, then the reliability of the water resistance meter is improved, but the device complexity and operational workload increase
Solution Approach 1:
The adapter apparatus is divided into a housing part and a blocking part that can be independently operated. The blocking part can be moved to different positions (first position for blocking, second position for allowing flow) without detaching the entire adapter from the process tank. This segmentation allows the water resistance meter to remain connected while protecting it from chemical solutions during non-cleaning processes.
Solution Approach 2:
The adapter apparatus acts as an intermediary device between the process tank and the water resistance meter. It includes a blocking part that can be positioned to either allow water flow to the meter or block chemical solutions from reaching the meter. This intermediary structure eliminates the need for manual detachment and mounting of the water resistance meter itself.
2Reliability
If the water resistance meter is frequently detached and mounted to avoid chemical solution damage, then the reliability is improved, but the productivity decreases due to complex operations
Solution Approach 1:
The blocking function is extracted from the water resistance meter itself and placed into a separate blocking part of the adapter apparatus. This allows the water resistance meter to remain permanently mounted on the process tank while the blocking part is moved to protect the meter during non-cleaning processes. The protective function is separated from the measurement function, improving productivity.
Solution Approach 2:
The blocking part is designed to be movable between a first position (blocking the inner cavity) and a second position (allowing connection between process tank and water resistance meter). This dynamic positioning mechanism allows rapid switching between cleaning and non-cleaning modes without manual detachment, significantly improving operational efficiency and productivity.
3Ease of operation
If the water resistance meter remains permanently connected to the process tank, then the ease of operation is improved, but the reliability decreases due to chemical solution damage risk
Solution Approach 1:
The adapter apparatus creates a localized protective environment for the water resistance meter. The blocking part can be positioned to block only the specific pathway from the process tank to the meter during non-cleaning processes, while allowing normal operation during cleaning processes. This localized control provides both permanent connection convenience and chemical solution protection.
Data Source
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AI summary
There are provided an adapter apparatus and a semiconductor process device using the same. The adapter apparatus (300) is configured to connect a water resistance meter (200) to a process tank (100), and includes a housing part (310) and a blocking part (320), the housing part is provided with a first inner cavity (313), and the first inner cavity is configured to be respectively connected with the process tank and the water resistance meter; the blocking part is movably disposed in the first inner cavity to be switched between a first position and a second position; in a case where the blocking part is at the first position, the blocking part blocks the first inner cavity; and in a case where the blocking part is at the second position, the process tank is connected with the water resistance meter through the first inner cavity. The adapter apparatus can avoid damage to the water resistance meter, and obviates the need for an operator to detach and mount the water resistance meter, thereby overcoming the problems of complex operation and low equipment productivity.