Method and device for generating power from a hydrogen-rich industry exhaust gas
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Solution Overview
Problem
Current methods for handling hydrogen-rich industrial waste gas from semiconductor production and processing plants often fail to utilize its energy content effectively, leading to wasted energy resources and environmental concerns due to the need for extensive purification and separation processes.
Innovation Solution
A method and device that utilize a compressor and fuel cells to convert hydrogen from waste gas into electricity, with controlled inlet pressure regulation and optional gas conditioning, allowing for efficient energy generation and resource utilization while maintaining process stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If hydrogen is separated and purified using filter technologies, then hydrogen purity is improved, but device complexity and energy expenditure increase
Solution Approach 1:
The invention extracts only the essential function of hydrogen utilization from the complex purification system. Instead of fully separating and purifying hydrogen through multiple filter stages, the system directly uses the hydrogen-rich exhaust gas composition (typically 30-70% hydrogen) as fuel for combustion or fuel cells, eliminating the need for complex separation infrastructure while maintaining effective energy recovery
Solution Approach 2:
The invention converts the previously harmful waste gas discharge into a beneficial energy source. The hydrogen-rich exhaust gas, which was formerly treated as waste requiring complex abatement systems, is now directly utilized as fuel for power generation through combustion engines or fuel cells, transforming an environmental problem into an energy solution
2Loss of energy
If hydrogen-rich exhaust gas is used for power generation, then energy utilization is improved, but process stability may be affected due to pressure fluctuations
Solution Approach 1:
The invention introduces a buffer volume (accumulation vessel) as an intermediary between the exhaust gas source and the power generation device. This buffer absorbs pressure fluctuations and flow variations, decoupling the process chamber from the power generation system. The buffer volume ensures stable fuel supply to the combustion engine or fuel cell while maintaining constant pressure in the semiconductor processing chamber
Solution Approach 2:
The invention changes the operational parameters of the power generation device to match the characteristics of the exhaust gas flow. By adjusting the fuel input rate, air-to-fuel ratio, and operating pressure of the combustion engine or fuel cell to correspond with the exhaust gas generation rate, the system maintains process stability while maximizing energy recovery
3Object-affected harmful factors
If extensive cleaning stages are implemented, then environmental safety is improved, but loss of time and energy increase
Solution Approach 1:
The invention changes the approach from removing contaminants to tolerating and managing them. Instead of implementing extensive cleaning stages to achieve high purity, the system adjusts the operational parameters of the power generation device to handle the raw exhaust gas composition, including contaminants like water vapor, CO2, and process-specific gases, thereby reducing time and energy losses
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the efficient conversion of hydrogen-rich waste gas into useful electrical energy, enhancing resource efficiency and environmental protection by utilizing existing abatement systems and maintaining process stability in sensitive semiconductor processes.
Implementation Method 1
the exhaust gas is first compressed
Implementation Method 2
at least part of the hydrogen contained in the exhaust gas is converted into electricity in one or more fuel cells
Data Source
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AI summary
The present invention relates to a method and a device for generating energy from hydrogen-rich industrial waste gas, in particular from semiconductor production and/or semiconductor processing plants. In the process, the exhaust gas is passed through a power generation device with at least one compressor (2) and one or more fuel cells (3). In the power generation device, the exhaust gas is compressed and power is generated from at least part of the hydrogen contained therein. The compressor (2) is connected to the outlet of the exhaust system, with the inlet pressure of the compressor (2) being regulated to a set value. With the method and the associated device, the energy content of the hydrogen contained in the hydrogen-containing industrial waste gas can be converted at least in part into useful electrical energy. The method and the device can be used in particular for the reconversion of the industrial waste gas from plants used in semiconductor production and/or processing without affecting these processes.