Method of controlling a temperature control system with ORIT valve
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Solution Overview
Problem
The trapped ramp temperature control system experiences a slowdown in ramp-up rate due to refrigerant condensation within the load and liquid buildup at the ORIT valve, which obstructs flow and reduces heating efficiency.
Innovation Solution
Incorporating a volume capacitance downstream of the electrostatic chuck to collect liquid refrigerant and using a controllable slope for the ORIT valve to prevent liquid accumulation, allowing gradual opening and ensuring continuous refrigerant flow during the heat-up phase.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If refrigerant condensation is allowed within the load during ramp-up, then heating efficiency is improved, but liquid buildup obstructs flow and reduces heating efficiency
Solution Approach 1:
The patent introduces a volume capacitance (liquid collection chamber) downstream of the load before the ORIT valve. This preliminary action collects liquid refrigerant that condenses during ramp-up, preventing it from accumulating at the ORIT valve and obstructing flow. The capacitance acts as a buffer that captures liquid before it can cause problems, allowing continuous efficient heating during the ramp-up phase.
Solution Approach 2:
The volume capacitance serves as an intermediary element between the load and the ORIT valve. It mediates the conflict between condensation (which provides heating) and liquid buildup (which obstructs flow). By introducing this intermediate chamber, the system can tolerate liquid refrigerant without it reaching the ORIT valve, thus maintaining both heating efficiency and flow continuity.
2Speed
If ORIT valve opens rapidly to allow refrigerant flow, then heating response is improved, but liquid accumulation occurs and obstructs flow
Solution Approach 1:
The volume capacitance is positioned to collect liquid refrigerant before it can accumulate at the ORIT valve. This preliminary collection action allows the ORIT valve to open rapidly for heating response without the risk of liquid obstruction, as the capacitance intercepts the liquid phase separately.
3Quantity of substance
If liquid refrigerant is allowed to accumulate during heat-up phase, then mass handling is simplified, but flow obstruction and heating efficiency loss occur
Solution Approach 1:
The patent segments the refrigerant flow path into two distinct zones: a liquid collection zone (volume capacitance) and a flow control zone (ORIT valve). By segmenting the system this way, liquid refrigerant can be collected and managed in the capacitance without interfering with the heating efficiency in the flow control zone. The segmentation allows each part to perform its function optimally.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution maintains consistent refrigerant flow and heating efficiency by preventing liquid buildup, allowing the system to rapidly heat the electrostatic chuck to higher temperatures without mass accumulation, thus enhancing the trapped ramp system's performance.
Implementation Method 1
refrigerant condensing within the load
Implementation Method 2
refrigerant condensing within the load ESC until the open-on-rise-of-inlet-temperature (ORIT) valve simultaneously allows refrigerant flow
Implementation Method 3
the pressure attains its target value, flow is established through the ORIT as it is designed
Data Source
Figure 1
Figure 2~4
Figure 5
AI summary
A temperature control system employing a two-phase refrigerant and a compressor/condenser loop is disclosed wherein a two phase refrigerant condenses within the load, the system including a thermo-expansion valve that simultaneously allows refrigerant flow through the thermo-expansion valve and regulates a temperature of the refrigerant in its two phase state ahead of the thermo-expansion valve, and wherein a flow through the thermo-expansion valve occurs only after a pressure and temperature upstream of the thermo-expansion valve reaches a final temperature and pressure.