Metrology Data Estimation Using Matrix Completion

The patent pre-calculates and stores optical responses for various feature parameters in a library before actual metrology measurements are performed. This preliminary simulation work is done offline, allowing rapid comparison with measured data during production without time-consuming real-time simulations, thus resolving the contradiction between measurement precision and time consumption

The patent creates a library of pre-simulated optical responses that serve as reference copies for comparison with actual measurements. Instead of simulating from scratch during measurement, the system uses these pre-prepared copies, significantly reducing measurement time while maintaining precision through accurate reference data

The patent segments the computational task by dividing the parameter space into discrete values (e.g., CD values, sidewall angles, line widths) and pre-calculating optical responses for each segment. This allows the complex simulation to be performed once for each parameter combination and stored, rather than recalculating fully for every measurement, improving both accuracy and computational efficiency

The patent performs comprehensive optical response simulations in advance for all expected parameter combinations and stores these results in a library. This preliminary computational effort is made once during library generation, enabling rapid and accurate measurements later without repeating the full computational burden, thus resolving the contradiction between data accuracy and computational efficiency