Optical Device Metrology System for Display Leakage Measurement

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Solution Overview

Problem

Existing optical devices for augmented, virtual, and mixed reality applications face challenges in controlling the intensity of out-coupled light, leading to inadequate display performance.

Innovation Solution

An optical device metrology system is developed to measure various metrics, including a display leakage metric, by using a stage with a tray that moves along a stage path and is aligned with multiple detectors and light engines to capture and process images of projected light beams.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If surface relief gratings are used to couple light into and out of augmented waveguide combiners, then light coupling is achieved, but the intensity of the out-coupled light cannot be adequately controlled

Engineering Contradiction:

Improveintensity of out-coupled lightVSAvoidlight coupling control

Core Design Contradiction:

Illumination intensityVSEase of manufacture

Solution Approach 1:

The patent applies parameter changes by varying the depth, spacing, and profile of the surface relief grating structures to precisely control the diffraction efficiency and thus the intensity of out-coupled light. By adjusting these geometric parameters during manufacturing, the system achieves adequate control over light intensity while maintaining the manufacturing simplicity of surface relief techniques

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively determines multiple metrology metrics for optical devices, enhancing their performance and quality by accurately measuring display leakage and other critical parameters.

Implementation Method 1

Light is coupled into and out of augmented waveguide combiners using surface relief gratings

Methodology Applied

Scientific EffectLight coupling: Diffraction

Implementation Method 2

Generated light is in-coupled into an augmented waveguide combiner, propagated through the augmented waveguide combiner

Methodology Applied

Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 3

Light is coupled into and out of augmented waveguide combiners using surface relief gratings

Methodology Applied

Scientific EffectDiffraction: Diffraction Grating

Implementation Method 4

a first detector positioned within the first body and mounted above the stage path to receive first projected light beams projected upwardly from the stage path

Methodology Applied

Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS12236575B2In-line metrology systems, apparatus, and methods for optical devices

Publication Date: 2025.02.25 APPLIED MATERIALS INC

AI summary

Embodiments of the present disclosure relate to optical devices for augmented, virtual, and/or mixed reality applications. In one or more embodiments, an optical device metrology system is configured to measure a plurality of first metrics and one or more second metrics for optical devices, the one or more second metrics including a display leakage metric.