Metrology System Automatic Library Regression Transition
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Solution Overview
Problem
Current metrology systems face limitations in adapting to process changes, with real-time regression requiring expensive computing resources and slowing overall throughput, while library measurements are slow to update and risk measurement excursions during large process changes.
Innovation Solution
A metrology system that automatically transitions between using a library and regression for measurement processing based on predetermined conditions, allowing for flexible adaptation to process changes and efficient resource use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If real-time regression is used to solve Maxwell's equations vigorously, then measurement adaptability to process changes is improved, but computing cost and throughput are worsened
Solution Approach 1:
The patent pre-calculates and stores measurement signals for various parameter combinations in a library before actual measurement. This preliminary action allows the system to quickly retrieve pre-computed results during measurement without performing expensive real-time regression calculations, thus maintaining adaptability while improving throughput.
Solution Approach 2:
The patent dynamically switches between library-based measurement and real-time regression based on process conditions. When process changes are within expected ranges, the system uses the library for fast measurement. When significant deviations are detected, the system transitions to real-time regression to maintain measurement accuracy, optimizing the balance between adaptability and throughput.
2Productivity
If library measurement is used for fast processing, then throughput is improved, but measurement reliability during large process changes is worsened
Solution Approach 1:
The patent implements a feedback mechanism that continuously monitors measurement quality and process parameter deviations. When the system detects that process changes exceed the library's parameter ranges or measurement quality degrades, it triggers a transition from library-based measurement to real-time regression, ensuring measurement reliability is maintained during large process changes.
Solution Approach 2:
The patent dynamically adjusts the measurement mode based on process conditions. The system starts with library measurement for high throughput, but automatically switches to real-time regression when process deviations are detected, thus maintaining both high throughput during normal operation and measurement reliability during process changes.
3Adaptability or versatility
If real-time regression is used, then adaptability to process changes is improved, but computing resource cost is worsened
Solution Approach 1:
The patent performs the computationally expensive regression calculations in advance and stores the results in a library. During actual measurement, the system only needs to retrieve pre-computed results through simple parameter matching, dramatically reducing computing resource requirements while maintaining the ability to adapt to process changes within the library's parameter ranges.
Solution Approach 2:
The patent dynamically selects the measurement mode based on process conditions and resource availability. During normal operation with stable processes, the system uses the library to minimize computing costs. When significant process changes occur that require real-time adaptation, the system transitions to real-time regression, optimizing the balance between adaptability and computing resource consumption.
Data Source
AI summary
A metrology system, method, and computer program product that employ automatic transitioning between utilizing a library and utilizing regression for measurement processing are provided. In use, it is determined, by the metrology system, that a predetermined condition has been met. In response to determining that the predetermined condition has been met, the metrology system automatically transitions between utilizing a library and utilizing regression for measurement processing.