MFC Performance Calculation for Plasma Tool Degradation Prediction
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Solution Overview
Problem
It is challenging to accurately assess and predict the performance variation of mass flow controllers (MFCs) on plasma processing apparatuses due to aging, which affects the overall performance of the apparatus and is difficult to detect before abnormality occurs.
Innovation Solution
A performance calculation method that acquires shipment inspection data of MFCs, calculates performance values using coefficients, and predicts the performance degradation of the plasma processing apparatus, enabling correction and maintenance before operational issues arise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If shipment inspection data of multiple flow rate controllers is acquired and performance values are calculated using coefficients, then measurement precision of MFC performance is improved, but device complexity increases due to data processing requirements
Solution Approach 1:
The patent applies preliminary action by pre-calculating coefficients during the shipment inspection phase for multiple flow rate controllers. These coefficients are stored and later used to calculate performance values of individual MFCs installed in the plasma processing apparatus, avoiding the need for complex real-time measurements during operation.
Solution Approach 2:
The patent uses copying by creating a performance model based on shipment inspection data from multiple MFCs. The calculated performance values and coefficients serve as a reference model that can be used to assess individual MFC performance without requiring direct complex measurements on each device during operation.
2Reliability
If performance calculation methods are implemented to detect MFC degradation, then reliability of plasma processing apparatus is improved, but loss of time increases due to data processing and analysis
Solution Approach 1:
The patent performs preliminary calculations by establishing performance models and coefficients during the shipment inspection phase. This allows for rapid assessment of MFC performance during operation without requiring time-consuming real-time analysis, as the framework is already in place.
Solution Approach 2:
The patent implements feedback by continuously monitoring MFC performance using the pre-established models and comparing actual performance against expected values. This enables automatic detection of degradation trends and triggers maintenance alerts, reducing the time required for manual assessment while improving reliability.
3Manufacturing precision
If performance values are calculated based on shipment inspection data and coefficients, then manufacturing precision of performance assessment is improved, but loss of information increases due to data aggregation requirements
Solution Approach 1:
The patent applies segmentation by maintaining separate performance models for each flow rate controller while also creating an aggregated model from multiple MFCs. This allows individual MFC performance to be assessed with high precision using its specific shipment inspection data, while the aggregated model provides general performance trends.
Solution Approach 2:
The patent implements local quality by tailoring the performance assessment to each individual MFC based on its specific shipment inspection characteristics. Each MFC's performance is evaluated using coefficients and parameters specific to its inspection data, ensuring high precision assessment that accounts for individual variations rather than applying uniform standards.
Data Source
AI summary
A performance calculation method is provided. In the performance calculation method, shipment inspection data of multiple flow rate controllers are acquired. Further, first performance values indicating, as deviation values, performance of the flow rate controllers are calculated based on the acquired shipment inspection data and first coefficients for items indicating the performance of the flow rate controllers. Further, second performance values indicating, as deviation values, performance of a processing apparatus using the flow rate controllers are calculated based on the calculated first performance values and second coefficients for items indicating the performance of the processing apparatus.