MgO-AlN Thermal Spray Coating for Semiconductor Plasma Resistance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current semiconductor manufacturing equipment faces challenges with corrosion resistance and water absorption issues when exposed to halogen-based plasmas, particularly with materials like magnesium oxide, which is hygroscopic and difficult to thermally spray without volatilization, and existing thermal spray coatings for ceramic materials containing magnesium, aluminum, oxygen, and nitrogen have not been adequately studied.
Innovation Solution
A thermal spray coating with a main phase of a MgO—AlN solid solution, formed by hot-press sintering and pulverizing a mixture of magnesium oxide, aluminum oxide, and aluminum nitride, is developed, offering improved corrosion and water resistance, and a feedstock material with a specific composition and structure that facilitates easier thermal spraying.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If pure magnesium oxide is used as feedstock material for thermal spray, then corrosion resistance is achieved, but thermal spray conditions are difficult to select due to volatilization risk and the material is hygroscopic causing water absorption
Solution Approach 1:
The patent uses a composite feedstock material consisting of magnesium oxide powder (90-99 wt%) combined with aluminum oxide powder (1-10 wt%). This composite approach allows the coating to maintain the high corrosion resistance of MgO while the Al2O3 component suppresses volatilization during thermal spray and reduces hygroscopicity, thereby improving processability and coating quality
Solution Approach 2:
The patent optimizes the composition parameters of the feedstock material by controlling the weight ratio of MgO to Al2O3 within specific ranges (90:10 to 99:1). By adjusting these compositional parameters, the coating achieves both high corrosion resistance and reduced water absorption while maintaining good thermal spray processability
2Reliability
If magnesium oxide is used for members subjected to vacuum or reduced pressure, then corrosion resistance is provided, but water absorption occurs due to hygroscopic nature causing generation of water
Solution Approach 1:
The composite coating system combines MgO and Al2O3 where the Al2O3 component acts as a barrier to water vapor diffusion and reduces the overall hygroscopicity of the coating. This allows the coating to maintain high corrosion resistance while significantly reducing water absorption in vacuum environments
Solution Approach 2:
The coating creates a multi-functional structure where the MgO phase provides corrosion resistance while the Al2O3 phase provides low water absorption properties. This local differentiation of material functions within the composite coating resolves the contradiction between corrosion protection and water absorption prevention
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The MgO—AlN solid solution thermal spray coating demonstrates enhanced corrosion resistance and moisture resistance compared to pure magnesium oxide, allowing for effective protection of semiconductor manufacturing equipment components against halogen-based plasmas while minimizing water absorption.
Implementation Method 1
a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide
Implementation Method 2
the thermal spray coating has excellent corrosion resistance
Implementation Method 3
low water absorption for a highly reactive halogen-based plasma in semiconductor manufacturing
Data Source
AI summary
A thermal spray coating according to the present invention contains mainly magnesium, aluminum, oxygen, and nitrogen and has, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. The thermal spray coating is obtained by thermal spray of powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.