MgO-Spinel-YAP Composite Ceramic for Semiconductor Etching
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Solution Overview
Problem
Conventional ceramic materials used in semiconductor manufacturing equipment, such as aluminum and aluminum oxide, are prone to corrosion when exposed to corrosive gases, leading to shape changes, particle formation, and contamination, while magnesium oxide-based materials lack sufficient hardness and bending strength for effective use in these environments.
Innovation Solution
A composite ceramic body comprising magnesium oxide, spinel (MgAl2O4), and YAP (YAlO3) phases is developed, which enhances hardness, bending strength, and corrosion resistance, while maintaining low electrical resistivity and reducing manufacturing costs by optimizing the volume percentages of these phases.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If aluminum oxide or aluminum nitride is used as material for component parts exposed to corrosive gas, then corrosion resistance is improved, but mechanical strength and hardness remain insufficient
Solution Approach 1:
The patent creates a composite ceramic material consisting of MgO as the base phase combined with spinel (MgAl2O4) and YAP (YAlO3) phases. This composite structure achieves both high corrosion resistance from MgO and improved mechanical strength from the reinforcing phases, resolving the contradiction between corrosion resistance and mechanical strength.
Solution Approach 2:
The patent optimizes the composition ratios of MgO, spinel, and YAP phases to achieve the desired balance between corrosion resistance and mechanical strength. By controlling the proportions of each phase, the material properties are tuned to meet both requirements simultaneously.
2Reliability
If yttrium oxide or YAG-based ceramic materials are used to improve corrosion resistance, then resistance to corrosive gas is enhanced, but sinterability deteriorates and manufacturing cost increases
Solution Approach 1:
The patent introduces spinel (MgAl2O4) as an intermediary phase that facilitates sintering. The spinel phase acts as a sintering aid that promotes densification and improves sinterability, while the MgO base phase maintains high corrosion resistance. This intermediary phase resolves the contradiction between corrosion resistance and ease of manufacture.
3Reliability
If magnesium oxide is used as corrosion resistant material, then cost is reduced and corrosion resistance is improved, but hardness and bending strength become insufficient
Solution Approach 1:
The patent combines MgO with spinel and YAP phases to create a composite material. The MgO provides corrosion resistance and cost-effectiveness, while the spinel and YAP phases provide mechanical reinforcement, achieving both high corrosion resistance and adequate bending strength.
Solution Approach 2:
The patent creates a multi-phase composite where different phases are distributed throughout the material to provide different functions locally. The MgO phase provides corrosion resistance, while the spinel and YAP phases provide mechanical strength, achieving local optimization of properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composite ceramic body significantly improves mechanical properties and corrosion resistance, preventing shape changes and particle formation, and adjusts electrical resistivity as needed for semiconductor manufacturing equipment components, thereby enhancing the quality and performance of these components.
Implementation Method 1
yttrium oxide (Y2O3) and yttrium aluminum garnet (YAG) are drawing attention because of their excellent resistance to corrosion as compared to the above mentioned aluminum alloy and aluminum oxide
Implementation Method 2
During the formation of the reaction product, vaporization, volatilization and flaking of the reaction product occur. Consequently, particles are formed in the chamber
Implementation Method 3
During the formation of the reaction product, vaporization, volatilization and flaking of the reaction product occur
Implementation Method 4
magnesium oxide has higher thermal conductivity than those of the above aluminum oxide, yttrium oxide and yttrium aluminum garnet
Data Source
AI summary
A composite ceramic body which includes three phases consisting of a MgO phase, a YAP (YAlO3) phase and a spinel (MgAl2O4) phase. This composite ceramic body has a plasma resistance greater than that of alumina and approximately equal to that of MgO. Mechanical properties, such as hardness and bending strength, of the composite ceramic body, are approximately equal or superior to those of Al2O3. A raw material cost and a manufacturing cost thereof are lower than those of a rare-earth oxide. Further, electric conductive particles may be added thereto to lower an electrical resistivity. The composite ceramic body is suitably usable as component parts for a semiconductor manufacturing equipment.